This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …

With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

It has been nearly 8 years since the first edition of this book was published. I was surprised
as well as pleased to find that people who are practicing on nanofabrication for their own …

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

In recent years, Internet of Things (IoT) has become more and more important owing to the
rapid expansion of the number of computing devices and data sizes. The evolution of IoT …

CMOS–MEMS microresonators have become excellent candidates for developing portable
chemical VOC sensing systems thanks to their extremely large mass sensitivity …

We investigate theoretically the nonlinear dynamics and the emergence of chaos in
suspended beam micro/nanoelectromechanical (MEMS/NEMS) resonators actuated by two …

In this paper, a MEMS-based resonator with a novel effective stiffness tunability is presented.
The performance of the proposed resonator is based on the transversal vibration of the two …

Diamond has numerous outstanding properties in mechanics, physics, chemistry,
electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical …