The white-light-interference (WLI) three-dimensional topography fine detection has high
requirements for the chip-loading stage on levelling and vibration isolation capacity, to …

White light interferometers (WLI) are extremely powerful tools in the context of areal surface
topography instrumentation. With lateral scanning mechanisms, larger objects with trans …

In this study, we present lateral scanning white light interferometry (LS-WLI), where phase-
shifting algorithms are applied to inspect the topography of a large field of view (FOV) with …

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-
resolution topography measurements on moving surfaces. To achieve resolutions typically …

We utilize digital image‐plane holographic microscopy (DIPHM) to achieve the real‐time
surface profile measurement of microstructure. The impulse response functions of DIPHM …

针对微结构大范围无损测试问题, 提出了一种低重叠度的三维结构拼接方法.
首先基于实验参数将结构特征提取区域限制在测量过程中的重叠区域, 以减少误匹配出现的可能 …

As an important measuring technique, white light scanning interferometry can realize non-
contact, fast and high accurate measurement. However, when measuring the large step …

Micro Electro Mechanical Systems (MEMS) is developed based on the semi-conductor
technology, however, relative material, design, fabrication, simulation, packaging and test …

A new precision surface measurement technology which is based on wavelength-dispersed
optical-line scanning interferometry and is endowed with both vertical super-resolution and …

The development of micro-nanomanufacturing technology leads to higher requirement for
measurement technology, which gives birth to the ultra-precision measurement technology …