Effect of substrate temperature on growth mechanism and properties of PEALD-MgO dielectric films for amorphous-IGZO TFTs
ZB Su, XY Zhang, X Lin, XL Li, CX Quan… - Surface and Coatings …, 2024 - Elsevier
Magnesium oxide (MgO) films have been prepared by plasma enhanced atomic layer
deposition with bis (cyclopentadienyl) magnesium precursor and oxygen plasma reactant at …
deposition with bis (cyclopentadienyl) magnesium precursor and oxygen plasma reactant at …
Investigation of etch rate distribution by micro-hemisphere for the anisotropic wet etching of Ga-face gallium nitride crystal
Y Chen, Y Xing, X Lin, X Chen, Z Zhou… - Journal of Alloys and …, 2025 - Elsevier
The Ga-face gallium nitride (GaN) crystal has recently attracted significant research interest
in the micro/nano device due to its exceptional properties. Therefore, exploring low-cost and …
in the micro/nano device due to its exceptional properties. Therefore, exploring low-cost and …