Related US Application Data aging enclosure at the wafer level using MEMS (MicroElec (60)
Division of application No. 10/712,196, filed on Nov. troMechanical Systems) process …

An interferometric modulator is formed by a stationary layer and a mirror facing the stationary
layer. The mirroris movable between the undriven and driven positions. Landing pads …

Surfaces of a microelectromechanical device are disclosed comprising the steps of forming
a composite layer of a sac rificial material and a protective material, and selectively etching …

Methods of fabricating a microelectromechanical systems (MEMS) device With reduced
masking and MEMS devices formed by the same are disclosed. In one embodiment, a …

A system and method for manufacturing micro cavity packaging enclosure at the wafer level
using MEMS (MicroElectroMechanical Systems) process, wherein micro cavities are formed …

The present disclosure relates to semiconductor structures and, more particularly, to radio
frequency (RF) switches with airgap structures and methods of manufacture. The structure …

Described herein is the use of a diffusion barrier layer between metallic layers in MEMS
devices. The diffusion barrier layer prevents mixing of the two metals, which can alter …

(57) ABSTRACT A method for etching a target material in the presence of a structural
material with improved selectivity uses a vapor phase etchant and a co-etchant …

A microelectromechanical device (MEMS) utilizing nanoparticles for reducing stiction is
disclosed. In one embodiment, a microelectromechanical device is an interferometric …

A capacitance coupled, transmission line-fed, radio frequency MEMS switch and its
fabrication process using photoresist and other low temperature processing steps are …