Methods of fabrication and modeling of CMUTs–A review
AE Biriukov, AM Korsunsky - Sensors and Actuators A: Physical, 2024 - Elsevier
Widespread use of capacitive micromachined ultrasound transducers (CMUTs) has
motivated the development of a variety of methods for their fabrication and modeling. The …
motivated the development of a variety of methods for their fabrication and modeling. The …
Dual-frequency CMUT arrays for multiband ultrasound imaging applications
Dual-frequency capacitive micromachined ultrasonic transducers (CMUTs) are introduced
for multiscale imaging applications, where a single array transducer can be used for both …
for multiscale imaging applications, where a single array transducer can be used for both …
Equivalent electrical circuits for electroacoustic MEMS design: A review
R Liechti - Journal of Micromechanics and Microengineering, 2024 - iopscience.iop.org
At the era of powerful computers, it's tempting to employ finite element models early in the
design phase of a device. However, especially for MEMS devices, the dimensional ratios …
design phase of a device. However, especially for MEMS devices, the dimensional ratios …
Lumped-parameter equivalent circuit modeling of CMUT array elements
Design and modeling are key steps in the value chain of Capacitive Micromachined
Ultrasonic Transducer (CMUT) arrays. Although CMUT array element models are very …
Ultrasonic Transducer (CMUT) arrays. Although CMUT array element models are very …
Squeeze film effect in surface micromachined nano ultrasonic sensor for different diaphragm displacement profiles
In the present paper, we have analytically explored the small variations of the local pressure
in the trapped air film of both sides of the clamped circular capacitive micromachined …
in the trapped air film of both sides of the clamped circular capacitive micromachined …
A novelly universal theory: Toward accurately evaluating radial vibration characteristics for radially sandwiched spherical piezoelectric transducer
S Wang, S Lin - Ultrasonics, 2021 - Elsevier
With the development of ultrasonic technology, some ultrasonic processing technologies
require a wide processing range. In this paper, a radially sandwiched spherical piezoelectric …
require a wide processing range. In this paper, a radially sandwiched spherical piezoelectric …
Coupling effects of crosstalk and parasitic loss on capacitive micromachined ultrasonic transducers
Capacitive micromachined ultrasonic transducers (CMUTs) have been widely utilized in
applications of biomolecule monitoring, ultrasound medical diagnosis, and ultrasound …
applications of biomolecule monitoring, ultrasound medical diagnosis, and ultrasound …
A mems ultra-wideband (Uwb) power sensor with a fe-co-b core planar inductor and a vibrating diaphragm capacitor
S Vejella, S Chowdhury - Sensors, 2021 - mdpi.com
The design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS
power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar …
power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar …
An analytical and FEM simulation-based study of the dependence of capacitance profile on structural parameters of CMUT with and without vent
This paper presents the capacitive behaviour of a Capacitive Micromachined Ultrasound
Transducer (CMUT). A Finite Element Method (FEM)-based simulation is proposed to …
Transducer (CMUT). A Finite Element Method (FEM)-based simulation is proposed to …
[HTML][HTML] Radiation Impedance of Rectangular CMUTs
S Khorassany, EB Dew, M Rahim Sobhani, RJ Zemp - Sensors, 2024 - mdpi.com
Recently, capacitive micromachined ultrasound transducers (CMUTs) with long rectangular
membranes have demonstrated performance advantages over conventional piezoelectric …
membranes have demonstrated performance advantages over conventional piezoelectric …