Microelectromechanical systems (MEMS) for biomedical applications

C Chircov, AM Grumezescu - Micromachines, 2022 - mdpi.com
The significant advancements within the electronics miniaturization field have shifted the
scientific interest towards a new class of precision devices, namely microelectromechanical …

Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Analysis of anion exchange membrane fouling mechanism caused by anion polyacrylamide in electrodialysis

H Guo, L Xiao, S Yu, H Yang, J Hu, G Liu, Y Tang - Desalination, 2014 - Elsevier
Tertiary oil extraction technologies, especially polymer flooding, have been successfully
used to enhance oil recovery, but the enormous amount of produced oily wastewater is …

Nanostructures and surface nanomechanical properties of polyacrylonitrile/graphene oxide composite nanofibers by electrospinning

Q Wang, Y Du, Q Feng, F Huang, K Lu… - Journal of Applied …, 2013 - Wiley Online Library
In this work, polyacrylonitrile (PAN)/graphene oxide (GO) composite nanofibers were
prepared by a facile compounding and electrospinning processes. A small amount of GO …

Recent advances in bio-MEMS and future possibilities: An overview

Y Pandey, SP Singh - Journal of The Institution of Engineers (India): Series …, 2023 - Springer
Microelectromechanical systems (MEMS) are a technology that allows engineers to create
small, integrated devices with electrical and mechanical components to perform tasks …

Reliability research on micro-and nano-electromechanical systems: a review

A Arab, Q Feng - The International Journal of Advanced Manufacturing …, 2014 - Springer
Research on micro/nano-electro-mechanical system (MEMS/NEMS) reliability is of crucial
importance, due to the fact that we are facing an era in which MEMS and emerging NEMS …

Stability of charge distributions in electret films on the nm-scale

S Gödrich, HW Schmidt… - ACS Applied Materials & …, 2022 - ACS Publications
Electret materials find use in various applications, such as microphones or filter media. In
recent years, electrets have been used also increasingly on the micrometer scale, for …

Study of the effect of surface roughness on the performance of RF MEMS capacitive switches through 3-D geometric modeling

S Gopalakrishnan, A Dasgupta… - IEEE Journal of the …, 2016 - ieeexplore.ieee.org
Surface roughness is an important factor that influences the reliability and performance of
radio frequency microelectromechanical systems switches. The presence of surface …

Effect of deposition gas ratio, RF power, and substrate temperature on the charging/discharging processes in PECVD silicon nitride films for electrostatic NEMS/MEMS …

U Zaghloul, GJ Papaioannou… - Journal of …, 2011 - ieeexplore.ieee.org
The dependence of the electrical properties of silicon nitride, which is a commonly used
dielectric in nano-and micro-electromechanical systems (NEMS and MEMS), on the …

NEMS/MEMS Reliability

G Li, U Hanke, X Chen - Nanoelectronic Device Applications …, 2017 - books.google.com
Dielectric charging, understood to mean the accumulation of electric charge in the dielectric,
constitutes a major failure mechanism that inhibits the commercialization of various …