This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

This paper presents design of a RF MEMS (Radio Frequency Micro Electro Mechanical
system) capacitive shunt switch to study the switch performance which depends on various …

The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …

Abstract Micro‐electromechanical (MEM) switches, with advantages such as quasi‐zero
leakage current, emerge as attractive candidates for overcoming the physical limits of …

We present a new ultra-high isolation RF MEMS latching switch with ultra-low power
consumption dedicated to antenna switch applications in multiband and multi-standard …

Nanocrystalline Ni thin film exhibits poor thermo-mechanical properties due to its unstable
microstructure at elevated temperature. Here, the paper endows a new approach to solve …

In this paper, we present a novel laterally actuated DC-contact three-state RF MEMS switch.
Rotary electrostatic comb-drive actuators which can be rotated both clockwise and anti …

The miniaturization and low power consumption characteristics of RF MEMS (Radio
Frequency Microelectromechanical System) switches provide new possibilities for the …