Processes and apparatus for preparing heterostructures with reduced strain by radial distension

RJ Falster, VV Voronkov, JA Pitney… - US Patent …, 2017 - Google Patents
Apparatus and processes for preparing heterostructures with reduced strain are disclosed.
The heterostructures may include a semiconductor structure that conforms to a surface layer …

Non-contact etch annealing of strained layers

P Ong, F Henley, I Malik - US Patent App. 11/594,536, 2007 - Google Patents
The present invention provides a method of forming a strained semiconductor layer. The
method comprises growing a strained first semiconductor layer, having a graded dopant …

Semiconductor-on-insulator wafer manufacturing method for reducing light point defects and surface roughness

Q Liu, JL Libbert - US Patent 9,202,711, 2015 - Google Patents
(57) ABSTRACT A method for reducing light point defects of a semiconductor on-insulator
structure and a method for reducing the Surface roughness of a semiconductor-on-insulator …

Method and structure for fabricating solar cells using a thick layer transfer process

FJ Henley - US Patent 7,811,900, 2010 - Google Patents
(57) ABSTRACT A photovoltaic cell device, eg, Solar cell, Solar panel, and method of
manufacture. The device has an optically transpar ent substrate comprises a first surface …

Substrate cleaving under controlled stress conditions

F Henley, A Lamm, YL Chow - US Patent 8,993,410, 2015 - Google Patents
(57) ABSTRACT A thickness of material may be detached from a substrate along a cleave
plane, utilizing a cleaving process controlled by a releasable constraint plate. In some …

Layer transfer of films utilizing controlled shear region

FJ Henley - US Patent 9,362,439, 2016 - Google Patents
(57) ABSTRACT Related US Application Data A film of material may be formed by providing
a semicon (60) Provisional application No. 61/051,307, filed on May ductor Substrate having …

Layer transfer of films utilizing controlled propagation

FJ Henley - US Patent 8,293,619, 2012 - Google Patents
(57) ABSTRACT A film of material may be formed by providing a semicon ductor Substrate
having a Surface region and a cleave region located at a predetermined depth beneath the …

Method and system for fabricating strained layers for the manufacture of integrated circuits

FJ Henley, PJ Ong, IJ Malik, HR Kirk - US Patent 7,094,666, 2006 - Google Patents
A method for forming a strained layer of semiconductor material, eg, silicon, germanium,
Group III/V, silicon germanium alloy. The method includes providing a non-deformable …

Layered semiconductor wafer with low warp and bow, and process for producing it

M Blietz, R Hoelzl, R Wahlich, A Huber - US Patent App. 11/206,599, 2006 - Google Patents
0001) 1 Field of the Invention 0002 The invention relates to a semiconductor wafer with a
diameter of at least 200 mm produced by a layer transfer process including at least one RTA …

Techniques for forming thin films by implantation with reduced channeling

A Brailove, Z Liu, FJ Henley, AJ Lamm - US Patent 8,329,557, 2012 - Google Patents
Embodiments of the present invention relate to the use of a particle accelerator beam to form
thin films of material from a bulk substrate. In particular embodiments, a bulk substrate …