Compliant grinding and polishing refers to a class of fine material processing methods
relying on one or more system element being compliant with the workpiece surface in a …

Various non-resonant piezoelectric actuators have been emerged in recent decades and
they have been applied successfully in many industrial fields, such as medical apparatuses …

This paper reports the design, analysis and testing of a parallel two degree-of-freedom piezo-
actuated compliant stage for XY nanopositioning by introducing an innovative hybrid …

This paper presents a novel actuator-internal two degree-of-freedom (2-DOF) micro/nano
positioning stage actuated by piezoelectric (PZT) actuators, which can be used as a fine …

This paper presents the design, modeling, and test of a novel normal-stressed
electromagnetic (NSEA) compliant nano-positioning stage. The stage has a concise …

Multifarious flexure-based displacement amplifiers have been proposed and studied in the
past decades, showing importance in many industrial fields, such as bioengineering, optical …

A novel piezo-actuated compliant mechanism is developed to obtain triaxial translational
motions with decoupled features for nanocutting. Analytical modeling of the working …

This paper presents a comprehensive review of mechanical design and synthesis methods
for piezo-actuated compliant micro-positioning stages, which play an important role in areas …

For stick–slip piezoelectric actuators working under the friction-inertia principle, the
backward motion is nearly unavoidable especially at low driving frequency, which is …

This article reports on the mechanism design, dimension optimization, closed-loop control,
and practical application of a piezoelectrically actuated fast tool servo (FTS) for the diamond …