Aluminium nitride integrated photonics: a review
Integrated photonics based on silicon has drawn a lot of interests, since it is able to provide
compact solution for functional devices, and its fabrication process is compatible with the …
compact solution for functional devices, and its fabrication process is compatible with the …
Ultra-wideband integrated photonic devices on silicon platform: from visible to mid-IR
Silicon photonics has gained great success mainly due to the promise of realizing compact
devices in high volume through the low-cost foundry model. It is burgeoning from laboratory …
devices in high volume through the low-cost foundry model. It is burgeoning from laboratory …
NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector
We demonstrate NDIR CO 2 gas sensing using CMOS compatible MEMS ScAlN-based
pyroelectric detectors. The ScAlN-based pyroelectric detectors are fabricated using 8-inch …
pyroelectric detectors. The ScAlN-based pyroelectric detectors are fabricated using 8-inch …
[HTML][HTML] A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride
In this paper, we fabricate and demonstrate a functional complementary metal-oxide-
semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped …
semiconductor (CMOS) compatible pyroelectric uncooled thermal detector using 12% doped …
CMOS AlN and ScAlN Pyroelectric Detectors with Optical Enhancement for Detection of CO2 and CH4 Gases
Gas sensors are useful for monitoring of greenhouse gases. As the move toward
complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room …
complementary metal‐oxide‐semiconductor (CMOS) compatible pyroelectric room …
Integrated nanophotonic waveguide-based devices for IR and Raman gas spectroscopy
S Alberti, A Datta, J Jágerská - Sensors, 2021 - mdpi.com
On-chip devices for absorption spectroscopy and Raman spectroscopy have been
developing rapidly in the last few years, triggered by the growing availability of compact and …
developing rapidly in the last few years, triggered by the growing availability of compact and …
Finite element simulation-based prediction of CMOS-compatible pyroelectric material in MEMS IR detectors
PB Agarwal - Microelectronics Reliability, 2023 - Elsevier
Aluminum nitride (AlN) and zinc oxide (ZnO) have immensely drawn the interest of
researchers as lead-free and CMOS-compatible materials for pyroelectric applications to …
researchers as lead-free and CMOS-compatible materials for pyroelectric applications to …
CMOS compatible pyroelectric materials for infrared detectors
The pyroelectric materials offer good performance at room temperature because of their high
sensitivity and uniform spectral response in the wide infrared (IR) range. Out of various types …
sensitivity and uniform spectral response in the wide infrared (IR) range. Out of various types …
Miniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector
NDIR CO2 gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped
ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm …
ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm …
Infrared Non‐Invasive Exhaled Biomarker Sensing: A Review
Exhaled breath analysis is considered an effective tool for diagnosing the patient's metabolic
status because of its non‐invasive nature. Gas chromatography‐mass spectrometry (GC …
status because of its non‐invasive nature. Gas chromatography‐mass spectrometry (GC …