Micro-electro-mechanical system fabrication involves molding on a single substrate.
Chemical wet etching is common in these systems because it can provide a very high etch …

A draping technique was studied to deposit thin, visco-elastic AZ5214-E resist layers from a
water surface over planar and patterned substrates. A visco-elastic AZ5214-E layer forms on …

We have experimentally explored a new approach to local anodic oxidation (LAO) of a
semiconductor heterostructures by means of atomic force microscopy (AFM). We have …

Wide bandgap II-VI semiconductors, lattice-matched to InP substrates, show promise for use
in novel, visible wavelength photonic devices; however, release layers for substrate removal …

We performed reactive ion etching (RIE) in plasma to transfer patterns into (100),(110), and
(211) A wet-etch exposed in InP (100) wafers. At a power, pressure, self-bias, and substrate …

We studied the tilt, curvature and surface morphology of side facets of mesa ridges revealed
in (100) InP by etching in 3HCl (37%): 1H3PO4 (85%) through InGaAs mask. The ridges lay …

A draping technique was tested for the deposition of positive-tone AZ5214-E photo-resist
layers on non-planar (1 0 0)-oriented III–V substrates, which had a variety of three …

This thesis presents the development towards an integrated, monolithic, micro-electro-
mechanical system (MEMS) cantilever waveguide resonator chemical sensor using the III-V …

Nanotechnológia je v súčasnosti rýchlo sa rozvíjajúci odbor výskumu a vývoja vo viacerých
vedných disciplínach. Vo všeobecnosti pod týmto pojmom označujeme technologický odbor …

This dissertation presents the design, fabrication, and evaluation of the first monolithically
integrated MEMS resonant sensor system realized in the InP-InGaAs material family. The …