Recent advances in focused ion beam nanofabrication for nanostructures and devices: Fundamentals and applications

P Li, S Chen, H Dai, Z Yang, Z Chen, Y Wang, Y Chen… - Nanoscale, 2021 - pubs.rsc.org
The past few decades have witnessed growing research interest in developing powerful
nanofabrication technologies for three-dimensional (3D) structures and devices to achieve …

Recent developments in micromilling using focused ion beam technology

AA Tseng - Journal of micromechanics and microengineering, 2004 - iopscience.iop.org
The application of focused ion beam (FIB) technology in microfabrication has become
increasingly popular. Its use in microfabrication has advantages over contemporary …

Recent developments in nanofabrication using focused ion beams

AA Tseng - Small, 2005 - Wiley Online Library
Focused ion beam (FIB) technology has become increasingly popular in the fabrication of
nanoscale structures. In this paper, the recent developments of the FIB technology are …

Developments in micro/nanoscale fabrication by focused ion beams

CS Kim, SH Ahn, DY Jang - Vacuum, 2012 - Elsevier
Focused ion beam (FIB) technology has become increasingly attractive for the fabrication of
micro/nano structures for the purpose of the demands in industry and research. In this paper …

Fabrication of sub-5 nm nanochannels in insulating substrates using focused ion beam milling

LD Menard, JM Ramsey - Nano letters, 2011 - ACS Publications
The use of focused ion beam (FIB) milling to fabricate nanochannels with critical dimensions
extending below 5 nm is described. FIB milled lines have narrowing widths as they are …

Ultrafast nonlinear all-optical processes in silicon-on-insulator waveguides

R Dekker, N Usechak, M Först… - Journal of physics D …, 2007 - iopscience.iop.org
In this review we present an overview of the progress made in recent years in the field of
integrated silicon-on-insulator (SOI) waveguide photonics with a strong emphasis on third …

A review of focused ion beam sputtering

MY Ali, W Hung, F Yongqi - International journal of precision engineering …, 2010 - Springer
This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano
fabrication. Basic principles of FIB were briefly discussed, and then empirical and …

Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon

WCL Hopman, F Ay, W Hu, VJ Gadgil, L Kuipers… - …, 2007 - iopscience.iop.org
Focused ion beam (FIB) milling is receiving increasing attention for nanostructuring in silicon
(Si). These structures can for example be used for photonic crystal structures in a silicon-on …

Controlling second-harmonic diffraction by nano-patterning MoS2 monolayers

FJF Löchner, R Mupparapu, M Steinert, A George… - Optics express, 2019 - opg.optica.org
Monolayers of transition metal dichalcogenides have a strong second-order nonlinear
response enabling second-harmonic generation. Here, we control the spatial radiation …

Nanoimprinted hierarchical micro-/nanostructured substrates for the growth of cardiomyocyte fibers

MM Mühlberger, S Kopp, AA Deyett, M Pribyl… - …, 2023 - mdpi.com
Investigating the behavior of cardiomyocytes is an important part of drug development. We
present a structure and a related nanoimprint-based fabrication method, where the …