Frequency-modulated mems gyroscopes: A review
X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …
on MEMS craft has attracted more and more attention in recent years, owing to its …
A review on vibrating beam-based micro/nano-gyroscopes
K Larkin, M Ghommem, M Serrano… - Microsystem Technologies, 2021 - Springer
A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …
A PiezoMEMS Lissajous Frequency Modulated Gyroscope: Stability, Vibration Robustness and Challenges
A Ontronen, V Kaajakari, M Ishii… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article reports the characterization measurements for a piezoelectric frequency-
modulated (FM) gyroscope. The presented sensor has an exceptionally stable and robust …
modulated (FM) gyroscope. The presented sensor has an exceptionally stable and robust …
71 kHz frequency modulated PiezoMEMS gyroscope
A Ontronen, V Kaajakari, K Wjuga… - … on Inertial Sensors …, 2023 - ieeexplore.ieee.org
This paper reports a frequency modulated (FM) piezoelectric MEMS (piezoMEMS)
gyroscope. The gyroscope uses aluminum nitride for both actuation and sensing enabling …
gyroscope. The gyroscope uses aluminum nitride for both actuation and sensing enabling …
Miniaturized quadruple mass gyroscopes: challenges and implementation
M Gianollo, V Mastri, V Zega, M Bestetti… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
This work introduces the smallest quadruple mass gyroscope, fabricated with a standard
MEMS process within a 1 mm 2 area. The design highlights the challenges in miniaturizing …
MEMS process within a 1 mm 2 area. The design highlights the challenges in miniaturizing …