A spatial light modulator for use in projection display applications is provided. The spatial
light modulator includes a substrate including a plurality of electrically active circuits and an …

The invention provides a micro-electro-mechanical-system (MEMS) mirror device,
comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and …

(57) ABSTRACT A Voltage Storage cell circuit includes an access transistor and a storage
capacitor, wherein the Source of Said access transistor is connected to a bitline, the gate of …

US6992810B2 - High fill ratio reflective spatial light modulator with hidden hinge - Google
Patents US6992810B2 - High fill ratio reflective spatial light modulator with hidden hinge …

(57) ABSTRACT A method of fabricating an integrated spatial light modulator with contact
structures. The method includes providing a first Substrate having a bonding Surface …

(57) ABSTRACT A method for fabricating a micro electromechanical device includes
providing a first Substrate including control circuitry. The first substrate has a top surface and …

Fabrication of a micro mirror array having a hidden hinge that is useful, for example, in a
reflective spatial light modulator. In one embodiment, the micro mirror array is fabricated …

2006-11-20 Assigned to NIPPON TELEGRAPH AND TELEPHONE CORPORATION
reassignment NIPPON TELEGRAPH AND TELEPHONE CORPORATION ASSIGNMENT OF …

A micro mirror unit includes a micro mirror substrate, a wiring substrate and an
electroconductive spacer disposed between these substrates. The micro mirror substrate …

(57) ABSTRACT A reflective spatial light modulator device features two pairs of electrodes
formed on different metallization layers. Eleva tion of the upper electrode pair reduces its …