G-band rectangular waveguide filter fabricated using deep reactive ion etching and bonding processes

Z Xing-hai, S Guang-cun, D Yi-jia, B Jing-fu… - Micro & Nano Letters, 2012 - IET
A G-band microelectromechanical system (MEMS) rectangular waveguide iris filter is
designed and fabricated. The effects of the metallised layer and iris thickness, and …

Performance Evaluation of Microfluidically Tunable Microwave Filters

N Habbachi, K Besbes - Electronics, 2022 - mdpi.com
This paper presents a contribution to evaluating the performances of tunable devices
devoted to RF applications. It is based on reconfiguration by fluids of a capacitor/inductor …

Design and optimization of a microfluidic-based inductor used as a multifunction-sensor

N Habbachi, H Boussetta, MA Kallala… - Informacije …, 2022 - ojs.midem-drustvo.si
A planar miniaturized inductor has been designed in order to realize some transduction
functions linked to the presence of fluids. Its electrical behaviour has been studied for two …

Differential RF MEMS interwoven capacitor immune to residual stress warping

AM Elshurafa, KN Salama - Micro & Nano Letters, 2012 - IET
A RF MEMS capacitor with an interwoven structure is designed, fabricated in the
PolyMUMPS process and tested in an effort to address fabrication challenges usually faced …

[PDF][PDF] Microfluidics based on silicon, polymer and all-polymer technologies as an alternative to silicon, glass: a case study for TopSpot printheads

K Kalkandjiev - 2015 - freidok.uni-freiburg.de
The sample volumes handled in microfluidic devices are typically in the range of micro-to
millilitres. This leads to spatially extended structures, which often cannot be manufactured in …

[PDF][PDF] Differential RF MEMS

AM Elshurafa, KN Salama - Micro & Nano Letters, 2012 - academia.edu
An RF MEMS capacitor with an interwoven structure is designed, fabricated in the
PolyMUMPS process, and tested in an effort to address fabrication challenges usually faced …

[引用][C] Observation of Liquid Metal Actuation in Microfluidic Channels and Implementation to Tunable RF Inductors

Y Dogan - 2014