Nanofabrication by scanning probe microscope lithography: A review

AA Tseng, A Notargiacomo, TP Chen - Journal of Vacuum Science & …, 2005 - pubs.aip.org
In addition to its well-known capabilities in imaging and spectroscopy, scanning probe
microscopy (SPM) has recently shown great potentials for patterning of material structures in …

Nanoscale materials patterning and engineering by atomic force microscopy nanolithography

XN Xie, HJ Chung, CH Sow, ATS Wee - Materials Science and …, 2006 - Elsevier
This review article aims to provide an updated and comprehensive description on the
development of atomic force microscopy (AFM) nanolithography for structuring and …

[图书][B] Atomic force microscopy

P Eaton, P West - 2010 - books.google.com
Atomic force microscopy is an amazing technique that allies a versatile methodology (that
allows measurement of samples in liquid, vacuum or air) to imaging with unprecedented …

[图书][B] Nanostructures & nanomaterials: synthesis, properties & applications

G Cao - 2004 - books.google.com
This important book focuses on the synthesis and fabrication of nanostructures and
nanomaterials, but also includes properties and applications of nanostructures and …

[图书][B] The chemistry of nanomaterials: synthesis, properties and applications

CNR Rao, A Müller, AK Cheetham - 2006 - books.google.com
Keine Frage: Nanomaterialien gehören momentan zu den" hot topics", und zwar sowohl in
der Forschung als auch in der Industrie. Dieses Handbuch vereinigt die Expertisen …

Advanced oxidation scanning probe lithography

YK Ryu, R Garcia - Nanotechnology, 2017 - iopscience.iop.org
Force microscopy enables a variety of approaches to manipulate and/or modify surfaces.
Few of those methods have evolved into advanced probe-based lithographies. Oxidation …

Role of space charge in scanned probe oxidation

JA Dagata, T Inoue, J Itoh, K Matsumoto… - Journal of applied …, 1998 - pubs.aip.org
The growth rate and electrical character of nanostructures produced by scanned probe
oxidation are investigated by integrating an in situ electrical force characterization …

Atomic force microscopy lithography as a nanodevice development technique

A Notargiacomo, V Foglietti, E Cianci… - …, 1999 - iopscience.iop.org
Nanoscale science and technology is today mainly focused on the fabrication of
nanodevices. Our approach makes use of lithography processes to build the desired …

Nano-oxidation of silicon surfaces by noncontact atomic-force microscopy: size dependence on voltage and pulse duration

M Calleja, R Garcı́a - Applied Physics Letters, 2000 - pubs.aip.org
Local oxidation of silicon surfaces by noncontact atomic-force microscopy is an emerging
and promising method for patterning surfaces at the nanometer scale due to its very precise …

Kinetics of scanned probe oxidation: space-charge limited growth

E Dubois, JL Bubendorff - Journal of Applied Physics, 2000 - pubs.aip.org
Scanning probe microscopy SPM has recently demonstrated a strong potential in the field of
nanolithography. In particular, SPM-induced nano-oxidation has been successfully used for …