Ultimate vertical gate-all-around metal–oxide–semiconductor field-effect transistor and its three-dimensional integrated circuits

S Ye, K Yamabe, T Endoh - Materials Science in Semiconductor Processing, 2021 - Elsevier
Abstract According to the International Roadmap for Devices and Systems, gate-all-around
(GAA) metal–oxide–semiconductor field-effect transistors (MOSFETs) will become the main …

Improved electrostatics through digital etch schemes in vertical GaSb nanowire p-MOSFETs on Si

Z Zhu, A Jonsson, YP Liu, J Svensson… - ACS Applied …, 2022 - ACS Publications
Sb-based semiconductors are critical p-channel materials for III–V complementary metal
oxide semiconductor (CMOS) technology, while the performance of Sb-based metal-oxide …

Doping Profiles in Ultrathin Vertical VLS-Grown InAs Nanowire MOSFETs with High Performance

A Jonsson, J Svensson, EM Fiordaliso… - ACS applied …, 2021 - ACS Publications
Thin vertical nanowires based on III–V compound semiconductors are viable candidates as
channel material in metal oxide semiconductor field effect transistors (MOSFETs) due to …

Performance enhancement of GaSb vertical nanowire p-type MOSFETs on Si by rapid thermal annealing

Z Zhu, J Svensson, A Jönsson… - Nanotechnology, 2021 - iopscience.iop.org
GaSb is considered as an attractive p-type channel material for future III-V metal-oxide-
semiconductor (MOS) technologies, but the processing conditions to utilize the full device …

Formation of Si nanopillars through partial sacrificing in super passivation reactive ion etching

J Zhang, L Yu, S Ye, Q Zhao, J Guo, H Yin… - …, 2024 - iopscience.iop.org
The vertical gate-all-around (VGAA) metal-oxide-semiconductor field-effect transistor
(MOSFET) holds remarkable potential in the three-dimensional (3D) integrated circuits (ICs) …

Low-Power, Self-Aligned Vertical InGaAsSb NW PMOS With S< 100 mV/dec

A Krishnaraja, Z Zhu, J Svensson… - IEEE Electron Device …, 2023 - ieeexplore.ieee.org
III-V co-integration is less mature compared to Si/Ge CMOS due to their inferior pMOS
device performance. This letter adopts a novel quaternary InGaAsSb channel material in a …

Vertical III-V Nanowire Transistors for Low-Power Electronics

A Krishnaraja - 2023 - portal.research.lu.se
Power dissipation has been the major challenge in the downscaling of transistor technology.
Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) have struggled to keep a …

III-V Nanowire MOSFETs: RF-Properties and Applications

LE Wernersson - 2020 IEEE BiCMOS and Compound …, 2020 - ieeexplore.ieee.org
III-V MOSFETs provide improved electrostatic control at scaled gate lengths combined with a
considerable reduction in gate leakage current. Following the natural transistor evolution …