Terahertz (THz) radiation encompasses a wide spectral range within the electromagnetic
spectrum that extends from microwaves to the far infrared (100 GHz–∼ 30 THz). Within its …

Terahertz radiation for inspection and fault detection has been of interest for the
semiconductor industry since the first generation and detection of THz signals. Until recent …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

Failure analysis plays a major role in all areas of the semiconductor company especially
during product development cycle, 1st silicon stage, or in wafer processes and fabrication as …

Electro-optical terahertz pulse reflectometry (EOTPR) was introduced recently to isolate
faults in advanced IC packages. The EOTPR system provides 10 μm in distance accuracy …

We demonstrate in a first experimental study the application of novel micro-machined
optoelectronic probes for a time-domain reflectometry-based localization of discontinuities …

Abstract Electro Optical Terahertz Pulse Reflectometry (EOTPR), a terahertz based Time
Domain Reflectometry (TDR) technique, has been evaluated on Flip Chip (FC) and 3D …

Terahertz time-domain spectroscopy imaging system (THz-TDS) is becoming a promising
tool for packaged integrated circuit (IC) failure detection due to its nonmetal penetrability and …

Laser voltage probing is the newest generation of tools that perform timing analysis for
electrical fault isolation in advanced failure analysis facilities. This paper uses failure …

As process technologies of integrated circuits become more complex and the industry keeps
advancing packaging technologies like flip-chip, stacked die, Wafer-Level-packaging …