K Thillainadarajah, A Kormendy… - US Patent …, 2016 - Google Patents
BACKGROUND There is an opportunity to deploy pressure sensing mate rials in certain areas of manufacture or sports, where the handling, orientation and motion of an object may …
X Ding, JJ Frye, JHA Chiou - US Patent 8,215,176, 2012 - Google Patents
Many silicon based micro sensors use so-called MEMS (Microelectromechanical Systems) technology to achieve low cost and high performance. One such a device is a MEMS …
PD OKULOV - US Patent 10,663,357, 2020 - Google Patents
A low power consumption multi-contact micro electro-mechanical strain/displacement sensor and miniature autonomous self-contained systems for recording of stress and usage …
(57) ABSTRACT A sensor unit for detecting bending of the sensor unit comprises: a capacitive upper sensor having an upper capacitance and comprising first and second …
T Nakamura, H Suzuki - US Patent 8,803,405, 2014 - Google Patents
With the ultrasonic transducer discussed in the above men tioned publication, a silicon Substrate is used, and an opening is formed by etching down to the insulating layer from the …
P Rozgo, A Bradley, RS Jones, LF Ricks - US Patent 8,230,745, 2012 - Google Patents
(65) Prior Publication Data LLC US 2010/O122583 A1 May 20, 2010(57) ABSTRACT (51) Int. Cl. Method and system for a wet/wet differential pressure sensor GOIL I3/02(2006.01) …
JT Suminto, M Yunus - US Patent 8,627,559, 2014 - Google Patents
A method for manufacturing a Micro-Electro-Mechanical System pressure sensor, including forming a gauge wafer including a diaphragm and a pedestal region. The method includes …
A method of sensing a pressure applied to a surface comprises monitoring an electrical signal generated by redistribution of mobile ions in a piezoionic layer under the surface. An …
J Dangtran, R Horton - US Patent 8,643,127, 2014 - Google Patents
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