Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process

FJ Henley - US Patent 7,674,687, 2010 - Google Patents
(54) METHOD AND STRUCTURE FOR 6,033,974 A 3/2000 Henley et al. FABRICATING
MULTIPLETILED REGIONS 6,048,411 A* 4/2000 Henley et al............... 148,335 ONTO A …

Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process

FJ Henley - US Patent 7,351,644, 2008 - Google Patents
(57) ABSTRACT A method for fabricating one or more devices, eg, inte grated circuits. The
method includes providing a substrate (eg, silicon), which has a thickness of semiconductor …

Image sensor using thin-film SOI

NF Borrelli, MD Brady, RL Burt… - US Patent App. 11 …, 2008 - Google Patents
Systems and methods related to an image sensor of one or more embodiments include
Subjecting a donor semiconduc tor wafer to an ion implantation process to create an exfo …

Thin film photovoltaic structure

DF Dawson-Elli, KP Gadkaree… - US Patent App. 11 …, 2007 - Google Patents
Systems and methods of production of a photovoltaic device include creating on a donor
semiconductor wafer an exfo liation layer and transferring the exfoliation layer to an insulator …

Manufacturing strained silicon substrates using a backing material

FJ Henley, HR Kirk - US Patent 7,427,554, 2008 - Google Patents
A method for forming a strained silicon layer of semiconductor material. The method
includes providing a deformable surface region having a first predetermined radius of …

Method of fabricating an epitaxially grown layer

B Faure, F Letertre - US Patent 7,601,217, 2009 - Google Patents
6,323,108 B1* 1 1/2001 Kub et al....... 438,458 FOREIGN PATENT DOCUMENTS 6,323,110
B2* 1 1/2001 Ling............. 438,459 6,335.263 B1 1/2002 Cheung et al.. 438/455 WO WO …

Pre-made cleavable substrate method and structure of fabricating devices using one or more films provided by a layer transfer process

F Henley - US Patent App. 11/200,413, 2007 - Google Patents
(57) ABSTRACT A method for fabricating one or more devices, eg, inte grated circuits. The
method includes providing a multi layered substrate, Which has a thickness of material (eg …

Substrate stiffness method and resulting devices for layer transfer process

FJ Henley, HR Kirk, JA Sullivan - US Patent 8,241,996, 2012 - Google Patents
4,585,671 A 4, 1986 Kitagawa et al. 4,696,758 A 9/1987 Ovshinsky et al. 5, 120,394 A 6,
1992 Mukai 5,789,030 A 8, 1998 Rolfson 5,877,070 A 3, 1999 Goesele et al. 6,013,563 A …

Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species

FJ Henley, JA Sullivan, SG Kang, PJ Ong… - US Patent …, 2009 - Google Patents
(57) ABSTRACT A method for fabricating bonded Substrate structures, eg, silicon on silicon.
In a specific embodiment, the method includes providing a thickness of single crystal silicon …

Applications and equipment of substrate stiffness method and resulting devices for layer transfer processes on quartz or glass

F Henley, H Kirk, J Sullivan - US Patent App. 11/361,834, 2006 - Google Patents
A multilayered Substrate structure comprising one or more devices, eg, optoelectronic,
integrated circuit. The structure has a handle Substrate, which is characterized by a prede …