High‐performance vacuum‐processed metal oxide thin‐film transistors: a review of recent developments

HJ Kim, K Park, HJ Kim - Journal of the Society for Information …, 2020 - Wiley Online Library
Since 2010, vacuum‐processed oxide semiconductors have greatly improved with the
publication of more than 1,300 related papers. Although the number of researches on oxide …

Atomic layer deposition of an indium gallium oxide thin film for thin-film transistor applications

J Sheng, EJ Park, B Shong, JS Park - ACS applied materials & …, 2017 - ACS Publications
Indium gallium oxide (IGO) thin films were deposited via atomic layer deposition (ALD) using
[1, 1, 1-trimethyl-N-(trimethylsilyl) silanaminato] indium (InCA-1) and trimethylgallium (TMGa) …

Remarkably high hole mobility metal-oxide thin-film transistors

CW Shih, A Chin, CF Lu, WF Su - Scientific reports, 2018 - nature.com
High performance p-type thin-film transistor (p-TFT) was realized by a simple process of
reactive sputtering from a tin (Sn) target under oxygen ambient, where remarkably high field …

Self-assembled nanodielectrics for solution-processed top-gate amorphous IGZO thin-film transistors

K Stallings, J Smith, Y Chen, L Zeng… - … Applied Materials & …, 2021 - ACS Publications
Metal oxide semiconductors, such as amorphous indium gallium zinc oxide (a-IGZO), have
made impressive strides as alternatives to amorphous silicon for electronics applications …

Wearable 1 V operating thin-film transistors with solution-processed metal-oxide semiconductor and dielectric films fabricated by deep ultra-violet photo annealing at …

BS Yu, JY Jeon, BC Kang, W Lee, YH Kim, TJ Ha - Scientific reports, 2019 - nature.com
Amorphous metal-oxide semiconductors (AOSs) such as indium-gallium-zinc-oxide (IGZO)
as an active channel have attracted substantial interests with regard to high-performance …

Remarkably high mobility ultra-thin-film metal-oxide transistor with strongly overlapped orbitals

C Wei Shih, A Chin, C Fu Lu, W Fang Su - Scientific reports, 2016 - nature.com
High mobility channel thin-film-transistor (TFT) is crucial for both display and future
generation integrated circuit. We report a new metal-oxide TFT that has an ultra-thin 4.5 nm …

Remarkably high mobility thin-film transistor on flexible substrate by novel passivation material

CW Shih, A Chin - Scientific reports, 2017 - nature.com
High mobility thin-film transistor (TFT) is crucial for future high resolution and fast response
flexible display. Remarkably high performance TFT, made at room temperature on flexible …

Study on the lateral carrier diffusion and source-drain series resistance in self-aligned top-gate coplanar InGaZnO thin-film transistors

SY Hong, HJ Kim, DH Kim, HY Jeong, SH Song… - Scientific Reports, 2019 - nature.com
We investigated the lateral distribution of the equilibrium carrier concentration (n 0) along
the channel and the effects of channel length (L) on the source-drain series resistance (R …

Role of in-situ hydrogen plasma treatment on gate bias stability and performance of a-IGZO thin-film transistors

OK Prasad, SK Mohanty, CH Wu, TY Yu… - …, 2021 - iopscience.iop.org
This work investigates the effect of an in situ hydrogen plasma treatment on gate bias
stability and performance of amorphous InGaZnO thin-film transistors (TFTs) deposited by …

Investigation of the high mobility IGZO thin films by using co-sputtering method

CM Hsu, WC Tzou, CF Yang, YJ Liou - Materials, 2015 - mdpi.com
High transmittance ratio in visible range, low resistivity, and high mobility of IGZO thin films
were prepared at room temperature for 30 min by co-sputtering of Zn2Ga2O5 (Ga2O3+ 2 …