Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various
merits, such as low power consumption, being lightweight, having a small volume, accurate …

We survey progress over the past 25 years in the development of microscale devices for
pumping fluids. We attempt to provide both a reference for micropump researchers and a …

MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Manufacturing processes that can create extremely small machines have been developed in
recent years. Microelectromechanical systems (MEMS) refer to devices that have …

▪ Abstract The micromachining technology that emerged in the late 1980s can provide
micron-sized sensors and actuators. These micro transducers are able to be integrated with …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

The vast reduction in size and power consumption of CMOS circuitry has led to a large
research effort based around the vision of wireless sensor networks. The proposed networks …

This review paper focuses on interdigital electrodes-a geometric structure encountered in a
wide variety of sensor and transducer designs. Physical and chemical principles behind the …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …