We review studies of surface-interaction mechanisms for a surface microdischarge (SMD)
and an atmospheric pressure plasma jet (APPJ) with model polymers and biomolecules in …

This white paper considers the future of plasma science and technology related to the
manufacturing and modifications of plastics and textiles, summarizing existing efforts and the …

Polypropylene (PP) and Poly (vinyl alcohol)(PVA) both synthetics polymers but one of them
biodegradable, were surface modified by vacuum ultraviolet (VUV) irradiation. After VUV …

Photoresists are thin film materials designed to transform an optimal image into a
mechanical mask. Diverse exposure techniques such as photolithography induce …

Treatments of polymer films using either a MHz atmospheric pressure plasma jet (APPJ) or
an atmospheric pressure surface micro‐discharge (SMD) plasma are investigated. While the …

We describe controlled, self-limited etching of a polystyrene polymer using a composite
etching cycle consisting of sequential deposition of a thin reactive layer from precursors …

Using an inductively coupled plasma system, we study the effects of direct plasma, plasma-
generated high-energy photons in the ultraviolet and vacuum ultraviolet (UV/VUV), and …

Vacuum ultraviolet (VUV) photons emitted from excited atomic states are ubiquitous in
material processing plasmas. The highly energetic photons can induce surface damage by …

This study uses photoresist materials in combination with several optical filters as a
diagnostic to examine the relative importance of VUV‐induced surface modifications for …

Plasma process control applications require acquisition of diagnostic data at a rate faster
than the characteristic timescale of perturbations to the plasma. Diagnostics based on …