Nanoscale lithography on monolayer graphene using hydrogenation and oxidation

IS Byun, D Yoon, JS Choi, I Hwang, DH Lee, MJ Lee… - ACS …, 2011 - ACS Publications
Monolayer graphene is one of the most interesting materials applicable to next-generation
electronic devices due to its transport properties. However, realization of graphene devices …

Conductive polymers and metal oxide polymeric composites for nanostructures and nanodevices

SW Thomas, RR Khan, K Puttananjegowda… - Advances in …, 2020 - Elsevier
Nanostructures comprised of conductive polymers and metal oxide polymeric composites
facilitate the formation of smart nanopatterns for realizing nanodevices in the fields of …

Fabricating in-plane transistor and memory using atomic force microscope lithography towards graphene system on chip

DH Lee, CK Kim, JH Lee, HJ Chung, BH Park - Carbon, 2016 - Elsevier
Recently, various electronic components including transistor, barristor, memory, and
transparent electrode were implemented using graphene. While integrated circuits were …

Nanopatterning of thin amorphous vanadium oxide films by oxidation scanning probe lithography

AI Komonov, ND Mantsurov, BV Voloshin… - Applied Surface …, 2024 - Elsevier
Oxidation scanning probe lithography is one of the most promising techniques for
nanostructuring. Vanadium oxides constitute a class of functionally rich materials that are …

Role of humidity in local anodic oxidation: A study of water condensation and electric field distribution

M Bartošík, D Škoda, O Tomanec, R Kalousek… - Physical Review B …, 2009 - APS
This paper deals with the analysis of the influence of humidity on the process of local anodic
oxidation carried out by atomic force microscope (AFM) on GaAs (100) surfaces. Recent …

Nanoscale wafer patterning using SPM induced local anodic oxidation in InP substrates

C Ovenden, I Farrer, MS Skolnick… - Semiconductor Science …, 2021 - iopscience.iop.org
Atomic force microscopy (AFM) assisted local anodic oxidation (LAO) offers advantages over
other semiconductor fabrication techniques as it is a low contamination method. We …

Nanotribological properties of precision-controlled regular nanotexture on H-passivated Si surface by current-induced local anodic oxidation

Y Mo, W Zhao, D Huang, F Zhao, M Bai - Ultramicroscopy, 2009 - Elsevier
Nano-sized textures resulted from localized electrochemical oxidation by using atomic force
microscopy (AFM) were fabricated on H-passivated Si surface. In this paper, the fabrication …

[PDF][PDF] Nanoscale patterning by AFM lithography and its application on the fabrication of silicon nanowire devices

SD Hutagalung, KC Lew, T Darsono - Sains Malaysiana, 2014 - ukm.my
Many techniques have been applied to fabricate nanostructures via top-down approach
such as electron beam lithography. However, most of the techniques are very complicated …

[HTML][HTML] The initial stages of atomic force microscope based local anodic oxidation of silicon

AS Kozhukhov, DV Scheglov, LI Fedina, AV Latyshev - AIP Advances, 2018 - pubs.aip.org
In this paper, the initial stages of local anodic oxidation (LAO) process initiated by AFM
probe are studied on the wide (∼ 100μm) terraces of the atomic-smooth Si (111) surface …

[图书][B] Scanning Probe Lithography: Fundamentals, Materials, and Applications

YK Ryu, JM Rodrigo - 2022 - taylorfrancis.com
The most complete book available on scanning probe lithography (SPL), this work details
the modalities, mechanisms, and current technologies, applications, and materials on which …