Synthesis of Al Thin Films with High Optical Transmittance by DC Magnetron Sputtering Process Parameter Optimization
MS Rahman, HJ Lee, MA Uddin, IMR Fattah… - European Journal of …, 2023 - ej-eng.org
Nanostructured Al thin film with higher optical transmittance and electrical conductivity has
intensive applications in solar cells and optical and microelectronic devices. This …
intensive applications in solar cells and optical and microelectronic devices. This …
[引用][C] Experimental investigations on DC magnetron sputtering process parameters with optimization of Al thin film properties deposited on glass substrate
MS Rahman, HJ Lee, L Sultana, MS Islam, MA Udin…