Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap
strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

The recent developments of technologies in Internet of Things (IoT) provide the opportunities
for smart manufacturing with real-time traceability, visibility, and interoperability in production …

In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Cluster tools are automated production cells which are largely used for semiconductor
manufacturing. They consist of several processing modules (PMs) and a transportation …

Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

Time and resource management and optimization are two important challenges for an
emergency response process, by which all individuals and groups manage hazards in an …