Fore-vacuum plasma-cathode electron sources

VA Burdovitsin, EM Oks - Laser and particle beams, 2008 - cambridge.org
This paper presents a review of physical principles, design, and performances of plasma-
cathode direct current (dc) electron beam guns operated in so called fore-vacuum pressure …

Electron beam treatment of non-conducting materials by a fore-pump-pressure plasma-cathode electron beam source

VA Burdovitsin, AS Klimov… - … Sources Science and …, 2010 - iopscience.iop.org
In the irradiation of an insulated target by an electron beam produced by a plasma-cathode
electron beam source operating in the fore-vacuum pressure range (5–15 Pa), the target …

On the possibility of electron-beam processing of dielectrics using a forevacuum plasma electron source

VA Burdovitsin, AS Klimov, EM Oks - Technical physics letters, 2009 - Springer
An insulated target was irradiated by an electron beam generated by a forevacuum plasma
electron source operating in the pressure range of 5–15 Pa. Measurements of the target …

Experimental and theoretical evaluations of electron temperature in continuous electron beam generated plasmas

EH Lock, RF Fernsler, SG Walton - Plasma Sources Science and …, 2008 - iopscience.iop.org
In this paper an experimental and theoretical evaluation of electron temperature in
continuous, electron beam generated plasmas is presented. Spatial distributions of electron …

Generation of uniform electron beam plasma in a dielectric flask at fore-vacuum pressures

DB Zolotukhin, VA Burdovitsin… - Plasma Sources Science …, 2015 - iopscience.iop.org
We describe a system for the generation of spatially uniform and homogeneous dense
plasma in a dielectric flask using a forevacuum-pressure plasma-cathode electron beam …

Discharge in a long metal tube with an electron beam generated by a forevacuum plasma–cathode electron source

VA Burdovitsin, KI Karpov, IY Bakeev, EM Oks - Physics of Plasmas, 2022 - pubs.aip.org
We describe our investigations of the current distribution in a non-self-sustained hollow-
cathode glow discharge in a long metal tube. The discharge is initiated and sustained by …

Forevacuum-pressure plasma-cathode high-power continuous electron beam source

AA Zenin, IY Bakeev, AS Klimov, EM Oks… - Review of Scientific …, 2020 - pubs.aip.org
We describe a plasma-cathode electron beam source based on a hollow-cathode discharge
that is capable of generating a 9 kW dc electron beam at an accelerating voltage of 20 kV …

Effect of collector potential on the beam-plasma formed by a forevacuum-pressure plasma-cathode electron beam source

VA Burdovitsin, EM Oks… - Journal of Physics D …, 2018 - iopscience.iop.org
We consider the beam-plasma formed by an energetic electron beam at fore-vacuum
pressure, when the beam is terminated by an electron collector plate. We show that in the …

Beam-plasma discharge in a dielectric cavity by electron beam injection

DB Zolotukhin, MI Lomaev, EM Oks… - Plasma Sources …, 2019 - iopscience.iop.org
We have explored the beam-plasma discharge excited by the injection of a continuous
electron beam with energy 1–10 keV and current 10–60 mA into a cylindrical dielectric cavity …

Deposition of dielectric films on silicon using a fore-vacuum plasma electron source

DB Zolotukhin, EM Oks, AV Tyunkov… - Review of Scientific …, 2016 - pubs.aip.org
We describe an experiment on the use of a fore-vacuum-pressure, plasma-cathode, electron
beam source with current up to 100 mA and beam energy up to 15 keV for deposition of Mg …