Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …

This article provides an updated review of advances in the field of mirror-based laser beam
deflectors, including laser scanners. We propose a taxonomy of these techniques based …

This study designs and implements the piezoelectric MEMS scanning mirror with large scan
angle and reflection area for light beam manipulating applications. In this design, the …

Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in
consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable …

In this article, a low power and compact scanning micromirror for LiDAR (light detection and
ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning …

Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely
employed in different areas, such as optical switching and medical scan imaging. As the key …

The Micro-Electro-Mechanical-System (MEMS) micromirror has shown great advantages in
Light Detection and Ranging (LiDAR) for autonomous vehicles. The equipment on vehicles …

Light detection and ranging (LiDAR) devices based on micro-electromechanical systems
(MEMS) micromirrors have been promising sensors for automatic driving due to the …

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold
substantial potential for applications in various domains, including reconfigurable …

Microdisplacement detection plays a vital role in the position diagnosis and accurate
calibration of micro-electro-mechanical systems (MEMS) actuators. An optical …