This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Toward the objective of direct angle measurement using a rate integrating gyroscope (RIG)
without a minimum rate threshold and with performance limited only by electrical and …

Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still
attracting increasing interest from the sensors community especially when the nonlinear …

We report on a new design approach for XY symmetric resonator, emphasizing the increase
in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis …

Frequency symmetry of a cobweb-like disk resonator gyroscope (CDRG) has been
compared with a conventional ring-like disk resonant gyroscope (RDRG) in this letter to …

Abstract Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the
measurement of angular rates. They have a variety of applications from consumer …

This paper discusses the design and experimental characterization of a vacuum packaged
MEMS gyroscope with a novel quatrefoil suspension system fabricated on a (100) single …

Towards the objective of a rate integrating gyroscope (RIG) without a minimum rate
threshold and performance limited only by electrical and mechanical thermal noise, we …

A novel cobweb-like disk resonator gyroscope (CDRG) with a very small frequency split
between two degenerate modes has been designed and implemented. In comparison with …

This paper describes the operation of a high quality factor gyroscope in various regimes
where electromechanical nonlinearities introduce different forms of amplitude–frequency (A …