[HTML][HTML] A review on autoencoder based representation learning for fault detection and diagnosis in industrial processes

J Qian, Z Song, Y Yao, Z Zhu, X Zhang - Chemometrics and Intelligent …, 2022 - Elsevier
Process monitoring technologies play a key role in maintaining the steady state of industrial
processes. However, with the increasing complexity of modern industrial processes …

Learning deep multimanifold structure feature representation for quality prediction with an industrial application

C Liu, K Wang, Y Wang, X Yuan - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Due to the existence of complex disturbances and frequent switching of operational
conditions characteristics in the real industrial processes, the process data under different …

A novel unsupervised approach for batch process monitoring using deep learning

P Agarwal, M Aghaee, M Tamer, H Budman - Computers & Chemical …, 2022 - Elsevier
Process monitoring is an important tool used to ensure safe operation of a process plant and
to maintain high quality of end products. The focus of this work is on unsupervised Statistical …

A batch-wise LSTM-encoder decoder network for batch process monitoring

J Ren, D Ni - Chemical Engineering Research and Design, 2020 - Elsevier
Process monitoring is essential to keep quality consistency and operation safety in the batch
process. However, the existence of multiphase, nonlinearity and dynamic features in the …

A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems

HW Xu, QH Zhang, YN Sun, QL Chen, W Qin… - Journal of Manufacturing …, 2024 - Elsevier
Abstracts Wafer yield is crucial for assessing semiconductor fabrication enterprises' stability
and technological maturity. Quickly achieving the yield ramp-up of new products and timely …

Data-driven adaptive virtual metrology for yield prediction in multibatch wafers

HW Xu, W Qin, YL Lv, J Zhang - IEEE Transactions on Industrial …, 2022 - ieeexplore.ieee.org
Virtual metrology (VM) is widely used for yield management and control in semiconductor
manufacturing owing to its high real-time inspection, low cost, and convenient maintenance …

Multi-scale data-driven engineering for biosynthetic titer improvement

Z Cao, J Yu, W Wang, H Lu, X Xia, H Xu, X Yang… - Current Opinion in …, 2020 - Elsevier
Industrial biosynthesis is a very complex process which depends on a range of different
factors, from intracellular genes and metabolites, to extracellular culturing conditions and …

Probabilistic stationary subspace analysis for monitoring nonstationary industrial processes with uncertainty

D Wu, D Zhou, M Chen - IEEE Transactions on Industrial …, 2021 - ieeexplore.ieee.org
Actual industrial processes often show nonstationary characteristics, so nonstationary
process monitoring is significant to ensure the safety and reliability of industrial processes …

Sparsity and manifold regularized convolutional auto-encoders-based feature learning for fault detection of multivariate processes

C Zhang, J Yu, L Ye - Control Engineering Practice, 2021 - Elsevier
Deep neural networks (DNNs) are popular in process monitoring for its remarkable feature
extraction from data. However, the increased dimension and correlation of the process …

Deep discriminative representation learning for nonlinear process fault detection

Q Jiang, X Yan, B Huang - IEEE Transactions on Automation …, 2019 - ieeexplore.ieee.org
Nonlinear process fault detection remains a challenge, with representation learning being a
key step. In this article, a deep neural network (DNN)-based discriminative representation …