Quantitative phase imaging endoscopy with a metalens
Quantitative phase imaging (QPI) recovers the exact wavefront of light from intensity
measurements. Topographical and optical density maps of translucent microscopic bodies …
measurements. Topographical and optical density maps of translucent microscopic bodies …
Embedded micro-detectors for EUV exposure control in FinFET CMOS technology
CP Wang, BJ Lin, PJ Wu, JR Shih, YD Chih… - Nanoscale Research …, 2022 - Springer
An on-wafer micro-detector for in situ EUV (wavelength of 13.5 nm) detection featuring
FinFET CMOS compatibility, 1 T pixel and battery-less sensing is demonstrated. Moreover …
FinFET CMOS compatibility, 1 T pixel and battery-less sensing is demonstrated. Moreover …
Resolution-enhanced reflection ptychography with axial distance calibration
Reflection ptychography is a lens-free computational imaging technology that operates by a
coherent beam illuminated to a specimen inclined to the optical axis, a set of distorted …
coherent beam illuminated to a specimen inclined to the optical axis, a set of distorted …
Quantitative Phase Imaging with a Metalens
Quantitative phase imaging (QPI) recovers the exact wavefront of light from the intensity
measured by a camera. Topographical maps of translucent microscopic bodies can be …
measured by a camera. Topographical maps of translucent microscopic bodies can be …
Exceeding the limits of algorithmic self-calibrated aberration recovery in Fourier ptychography
Fourier ptychographic microscopy is a computational imaging technique that provides
quantitative phase information and high resolution over a large field-of-view. Although the …
quantitative phase information and high resolution over a large field-of-view. Although the …
[HTML][HTML] Mask defect detection by combining wiener deconvolution and illumination optimization
K Li, S Deng, A Zhang, J Fu, J Luo, X Chen… - Microelectronic …, 2024 - Elsevier
In the lithography process, mask defect is inevitably replicated on chips hence the yield and
quality of the product are directly related to the mask quality. Mask microscopy resolution is …
quality of the product are directly related to the mask quality. Mask microscopy resolution is …
Towards Full Field-of-View Fourier Ptychography for Extreme Ultraviolet Microscope
C Gu, A Islegen-Wojdyla, M Benk… - … IEEE Conference on …, 2024 - ieeexplore.ieee.org
We evaluate various Fourier ptychographic microscopy (FPM) reconstruction algorithms
using both simulated and experimental data acquired from an Extreme Ultraviolet (EUV …
using both simulated and experimental data acquired from an Extreme Ultraviolet (EUV …
An EUV Mask Microscopy System with two zone plate design
K Li, S Deng, J Fu, J Luo, Z Xing… - 2024 Conference on …, 2024 - ieeexplore.ieee.org
An EUV Mask Microscopy System with Two Zone Plate Design Page 1 XXX-X-XXXX-XXXX-X/XX/$XX.00
©20XX IEEE An EUV Mask Microscopy System with Two Zone Plate Design Kunyang Li Synchrotron …
©20XX IEEE An EUV Mask Microscopy System with Two Zone Plate Design Kunyang Li Synchrotron …
Exceeding the limits of algorithmic self-calibration in super-resolution imaging
Fourier ptychographic microscopy is a computational imaging technique that provides
quantitative phase information and high resolution over a large field-of-view. Although the …
quantitative phase information and high resolution over a large field-of-view. Although the …