This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

The recent development of Micro-Electro-Mechanical System (MEMS) technology has
provided new methods for researchers to design and fabricate seismometers and …

Precise measurement of variations in the local gravitational acceleration is valuable for
natural hazard forecasting, prospecting, and geophysical studies. Common issues of the …

Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …

This paper introduces a fiber-optic microelectromechanical system (MEMS) seismic-grade
accelerometer that is fabricated by bulk silicon processing using photoresist/silicon dioxide …

This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted
flexibly and even tuned to almost zero by using the electrostatic softening effect of two …

High-precision microelectromechanical inertial sensors based on spring-mass structures are
of great interests for a wide range of applications, including inertial navigation, disaster …

This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based
spring-mass sensing element. The displacement changes of the proof mass are sensed by …

Precision measurements of local gravitational acceleration variations are of great
importance in geophysical surveys. With advantages such as cost-effectiveness and …

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of
accelerometer that combines the merits of optical measurement and Micro-Electro …