Scanning mirrors can deflect, reflect, and pattern the laser beam. Traditional laser
galvanometers rely on deflection motors and mirrors, which are bulky and costly. Micro …

This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-
spring model to predict the dynamic response of electrostatic resonant micro-electro …

Recently, the development of LiDAR in the field of vehicle has made the core micromirror
with essential characteristics of large tilted angle and small size. We proposed a two …

We analyzed the electromagnetic performance of a novel optical switch in a form of
microelectromechanical (MEMS) device with a thin metallic microplate reflector supported by …