MEMS based sensors–A comprehensive review of commonly used fabrication techniques

R Hajare, V Reddy, R Srikanth - Materials Today: Proceedings, 2022 - Elsevier
The world needs efficient, cleaner and reliable technology that is compact, economic and
durable. Several attempts have been made in the past to cross these hurdles and design a …

SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor

J Jang, G Panusa, G Boero, J Brugger - Microsystems & …, 2022 - nature.com
Glass-like carbon (GC) is a nongraphitizing material composed entirely of carbon atoms
produced from selected organic polymer resins by controlled pyrolysis in an inert …

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

R Bernasconi, GP Invernizzi, E Gallo Stampino, R Gotti… - Micromachines, 2023 - mdpi.com
In the last few years, the manufacturing of microelectromechanical systems (MEMS) by
means of innovative tridimensional and bidimensional printing technologies has significantly …

Maskless lithography: An approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

M Jangra, DS Arya, R Khosla, SK Sharma - Microsystem Technologies, 2021 - Springer
In this work, Z-axis MEMS accelerometers are investigated with variation in spring
topography. The serpentine spring structure demonstrated the optimum sensitivity of MEMS …

Design and fabrication of polymer nanocomposite sensors

F Damiri, H Gaiji, II Muhamad, NAM Lazim… - … Materials for Sensor …, 2023 - Elsevier
Polymer and nanomaterial nanocomposite networks (defined as polymer nanocomposites)
have shown superior performance compared to conventional polymer materials. They are …

Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer

A Khlifi, A Ahmed, B Mezghani, R Patkar, P Dixit… - Microelectronics …, 2022 - Elsevier
This paper investigates the static and dynamic performances of a new enhanced design of 3-
axis MEMS polymer piezoresistive accelerometer. Its key geometric parameters are …

[HTML][HTML] Enhancement of Roll-to-Roll Gravure-Printed Cantilever Touch Sensors via a Transferring and Bonding Method

SH Lee, JH Shin, S Lee - Sensors, 2025 - mdpi.com
Sensor miniaturization offers significant advantages, including enhanced SoC integration
efficiency, reduced cost, and lightweight design. While the roll-to-roll printed electronics …

Intelligent wearable electronics: a new paradigm in smart electronics

R Matthew, J Dutta, R Maheswar, K Ahmed - Challenges and solutions for …, 2021 - Springer
In the last decade or so, the wearable electronics technology has seen an unprecedented
growth which is expected to reach around USD 51.60 billion by the year 2022 with a CAGR …

Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

Y Wang, K Huang, L Cheng - Optical Review, 2023 - Springer
In this paper, a high-precision accelerometer based on single-level diffraction of a single
grating is optimized and improved. The sensor consists of an optical system displacement …

Near-zero Poisson's Ratio and Large-area Metamaterial Made of UV-PDMS Using Three-dimensional Backside Exposure

R Ito, T Sekiguchi, VA Menon, R Ichige… - IEEJ Transactions on …, 2024 - jstage.jst.go.jp
In this study a micro-fabrication method is proposed for UV-PDMS, a UV-curable silicone
rubber required for flexible polymer MEMS. The three-dimensional backside exposure …