Advances in ultrashallow doping of silicon

C Zhang, S Chang, Y Dan - Advances in Physics: X, 2021 - Taylor & Francis
Ultrashallow doping is required for both classical field-effect transistors in integrated circuits
and revolutionary quantum devices in quantum computing. In this review, we give a brief …

[HTML][HTML] Germanium monolayer doping: successes and challenges for the next generation Ge devices

F Sgarbossa - Materials Science in Semiconductor Processing, 2023 - Elsevier
The growing interest in nanoelectronics and photonics, combined with the development of
new germanium-based devices, provide the impetus to develop new doping methods …

[HTML][HTML] Reducing specific contact resistivity for n-type germanium using laser activation process and nano-island formation

S Baik, H Jeong, G Park, H Kang, JE Jang… - Applied Surface …, 2023 - Elsevier
This study presents a laser activation process (LAP) for germanium (Ge) to improve the
electrical performance of n-type Ge devices. The LAP highly activated the dopant and …

1T-DRAM with shell-doped architecture

MHR Ansari, N Navlakha, JT Lin… - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
This paper reports on the usefulness of shell-doped (SD) junctionless (JL) transistor
architecture for operation as capacitorless dynamic random-access memory (1T-DRAM). SD …

Boron monolayer doping: Role of oxide capping layer, molecular fragmentation, and doping uniformity at the nanoscale

A Tzaguy, P Karadan, K Killi, O Hazut… - Advanced Materials …, 2020 - Wiley Online Library
Doping methodologies using monolayers offer controlled, ex situ doping of nanowires
(NWs), and 3D device architectures using molecular monolayers as dopant sources with …

Heavily phosphorus doped germanium with local strain compensation effect by Co-implantation and rapid thermal process

S Baik, H Jeong, G Park, H Kang, JE Jang… - Journal of Alloys and …, 2024 - Elsevier
This study explored the effects and mechanisms of phosphorus (P), tin (Sn), and yttrium (Y)
co-implantation in germanium (Ge). A series of dopant concentration measurements and …

Modeling source/drain lateral Gaussian doping profile of DG-MOSFET using Green's function approach

AK Shukla, A Nandi, S Dasgupta - Solid-State Electronics, 2020 - Elsevier
Present work has used Green's function approach to derive a two-dimensional analytical
model of the double gate (DG) MOSFET at the subthreshold regime of operation that …

Full activation of dopants by carbon-free self-assembled molecular monolayer doping

K Li, JY Zhang, S Chang, H Wei… - ACS Applied …, 2021 - ACS Publications
Self-assembled molecular monolayer doping may find important applications in doping
FinFET and nanowire transistors due to its nature of being conformal, nondestructive, and …

Broadband PureGaB Ge-on-Si photodiodes responsive in the ultraviolet to near-infrared range

T Knežević, M Krakers… - Optical Components and …, 2020 - spiedigitallibrary.org
Optical characterization of PureGaB germanium-on-silicon (Ge-on-Si) photodiodes was
performed for wavelengths between 255 nm and 1550 nm. In PureGaB technology …

Nanoscale n++-p junction formation in GeOI probed by tip-enhanced Raman spectroscopy and conductive atomic force microscopy

S Prucnal, Y Berencén, M Wang, YM Georgiev… - Journal of Applied …, 2019 - pubs.aip.org
Ge-on-Si and Ge-on-insulator (GeOI) are the most promising materials for the next-
generation nanoelectronics that can be fully integrated with silicon technology. To this day …