Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

The Electromechanical Amplitude Modulation (EAM) is frequently used to eliminate feed-
through signals between forcer and pick-off electrodes of resonant microstructures …

This paper reports mechanical ablation techniques for permanent frequency tuning of the
primary wineglass modes in planar gyroscopes with concentric ring suspension. Three …

We propose a MEMS gyroscope system working with a fixed resonance frequency which
combines resonant constant-frequency (RCF) driving and real-time automatic mode …

This paper reports on development of Dynamically Amplified dual-mass Gyroscope (DAG)
and introduces, for the first time, a Trap-and-Hold (TAH) concept intended to increase …

This paper reports a study on contribution of electromechanical amplitude modulation (EAM)
on performance of MEMS Coriolis vibratory gyroscopes (CVGs). We theoretically predicted …

This paper presents results on the instrumentation of a Dynamically-Amplified Gyroscope
(DAG) for direct measurement of the absolute angle of rotation. Through a modal …

This thesis is aimed at the development of low-cost, vacuum-packaged navigation-grade
microelectromechanical system (MEMS) Coriolis vibratory gyroscopes (CVG) using 3 …