Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision
motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical …

Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

Micromachined hemispherical shell resonators (HSRs) can be used in high accuracy
vibratory gyroscopes. These resonators need to have very low energy loss to achieve very …

Many MEMS gyroscopes rely on micro mechanical resonators to measure angular rotation.
Maximizing their quality factor (Q) will help improve accuracy. There are several energy …

We have fabricated polycrystalline diamond hemispheres by hot-filament CVD (HFCVD) in
spherical cavities wet-etched into a high temperature glass substrate CTE matched to …

This paper proposes and verifies a structure for the isolation of packaging stress in silicon-
on-insulator-based microelectromechanical systems devices. The packaging-stress isolation …

Due to the micro hemisphere structure's small anchor point area, the micro hemisphere
resonator and the Pyrex7740 glass electrode substrate are prone to tilt during the assembly …

This paper reports a wafer-level technique for the systematic elimination of the modal
frequency difference between a nominally degenerate pair of modes in an axisymmetric …

Aiming at the excitation coupling error caused by assembly eccentricity error in micro-
hemispherical resonator gyroscope (HRG), this paper proposes a method to identify …

Hemispherical shell micro-resonators may be used as gyroscopes to potentially enable
precision inertial navigation and guidance at low cost and size. Such devices require a high …