Area-selective depositions (ASD) take advantage of the chemical contrast between material
surfaces in device fabrication, where a film can be selectively grown by chemical vapor …

In this perspective we discuss the progress made in the mechanistic studies of the surface
chemistry associated with the atomic layer deposition (ALD) of metal films and the …

Moore's law drives the semiconductor industry to continuously shrink the critical size of
transistors. As a bottom-up self-aligned patterned film deposition technique with atomic-level …

Nanotechnology is a major megatrend that enables and accelerates many other
technological frontiers from electronics to medicine, from composites to reconfigurable …