Some embodiments include a MEMS apparatus configured to redirect light in a LiDAR
system and includes a support frame and a plurality of mirror elements disposed in a linear …

Methods and systems for using a dual sided MEMS mirror for determining a direction of
steered light are disclosed. In one example a MEMS package includes a substrate defining …

In one example, a light detection and ranging (LiDAR) module is provided. The LiDAR
module includes a micro electromechanical system (MEMS), a substrate on which the …

US11653939B2 - Microprojection arrays with microprojections having large surface area
profiles - Google Patents US11653939B2 - Microprojection arrays with microprojections …

Methods and systems for using a dual sided MEMS mirror for determining a direction of a
LiDAR beam are disclosed. In one example a MEMS package includes a dual sided MEMS …

Methods and systems for light steering are proposed. In one example, an apparatus
comprises: a light source; a receiver; a microelectromechanical system (MEMS) and a …

The present invention relates to devices and methods for detecting the amount (degree,
extent) of material coating a medical device or substrate, in particular the present invention …

Some embodiments include a MEMS apparatus configured to redirect light in a LiDAR
system and includes a support frame and a plurality of mirror elements disposed in a linear …