Green nanofabrication opportunities in the semiconductor industry: A life cycle perspective

E Mullen, MA Morris - Nanomaterials, 2021 - mdpi.com
The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene
epoch, characterised by the ever-increasing human impact on the environment. The …

[HTML][HTML] Progress and perspective on polymer templating of multifunctional oxide nanostructures

J Xu, AI Berg, B Noheda, K Loos - Journal of Applied Physics, 2020 - pubs.aip.org
Metal oxides are of much interest in a large number of applications, ranging from
microelectronics to catalysis, for which reducing the dimensions to the nanoscale is …

Highly Ordered Porous Inorganic Structures via Block Copolymer Lithography: An Application of the Versatile and Selective Infiltration of the “Inverse” P2VP-b-PS …

A Esmeraldo Paiva, JF Baez Vasquez… - … Applied Materials & …, 2022 - ACS Publications
A facile and versatile strategy was developed to produce highly ordered porous metal oxide
structures via block copolymer (BCP) lithography. Phase separation of poly (2-vinylpyridine) …

Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process

M Snelgrove, C McFeely, K Shiel, G Hughes… - Materials …, 2021 - pubs.rsc.org
Developing vapor phase infiltration (VPI) processes for area selective polymer
nanopatterning requires substantial advancement in understanding precursor infiltration …

Large‐Area Uniform 1‐nm‐Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A “Next‐Generation” Cu Diffusion Barrier?

YH Kang, S Lee, Y Choi, WK Seong, KH Han… - Advanced …, 2022 - Wiley Online Library
A reliable method for preparing a conformal amorphous carbon (a‐C) layer with a thickness
of 1‐nm‐level, is tested as a possible Cu diffusion barrier layer for next‐generation ultrahigh …

Precise Definition of a “Monolayer Point” in Polymer Brush Films for Fabricating Highly Coherent TiO2 Thin Films by Vapor-Phase Infiltration

R Lundy, P Yadav, N Prochukhan, EC Giraud… - Langmuir, 2020 - ACS Publications
In this work, we show that in order to fabricate coherent titania (TiO2) films with precise
thickness control, it is critical to generate a complete polymer brush monolayer. To date …

Strategy for enhancing ultrahigh-molecular-weight block copolymer chain mobility to access large period sizes (> 100 nm)

C Cummins, A Alvarez-Fernandez, A Bentaleb… - Langmuir, 2020 - ACS Publications
Assembling ultrahigh-molecular-weight (UHMW) block copolymers (BCPs) in rapid time
scales is perceived as a grand challenge in polymer science due to slow kinetics. Through …

Room temperature fabrication of macroporous lignin membranes for the scalable production of black silicon

N Prochukhan, SA O'Brien, A Davó-Quiñonero… - …, 2022 - ACS Publications
Rising global demand for biodegradable materials and green sources of energy has brought
attention to lignin. Herein, we report a method for manufacturing standalone lignin …

Tip‐Induced Nanopatterning of Ultrathin Polymer Brushes

R Gröger, T Heiler, T Schimmel, S Walheim - Small, 2023 - Wiley Online Library
Patterned, ultra‐thin surface layers can serve as templates for positioning nanoparticlesor
targeted self‐assembly of molecular structures, for example, block‐copolymers. This work …

Large-Area Fabrication of Vertical Silicon Nanotube Arrays via Toroidal Micelle Self-Assembly

N Prochukhan, A Selkirk, R Lundy, EC Giraud… - Langmuir, 2021 - ACS Publications
We present a highly scalable, room-temperature strategy for fabricating vertical silicon
nanotube arrays derived from a toroidal micelle pattern via a water vapor-induced block …