Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using
microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The …

A grayscale technology process for structuring of true 3D shapes into crystalline silicon (c-Si)
has been developed. The process combines maskless grayscale lithography and an …

The goal of the thesis was to add to the available microfabrication technologies and
strategies for microcantilever-based sensors, with particular emphasis on polymeric …

To remove the shortcomings from the manufacturing process it is necessary to optimize all
process parameters, for all stages of technological process: the exposure, the development …

Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using
microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The …

For the laser spot size, the blazed diffractive grating fabricated with direct laser writing will
has a slantwise lateral facet edge. To evaluate the influence of the slope of the facet edge of …