[HTML][HTML] Deep level defect states in β-, α-, and ɛ-Ga2O3 crystals and films: Impact on device performance

AY Polyakov, VI Nikolaev, EB Yakimov, F Ren… - Journal of Vacuum …, 2022 - pubs.aip.org
A review is given of reported trap states in the bandgaps of different polymorphs of the
emerging ultrawide bandgap semiconductor Ga 2 O 3. The commonly observed defect …

Ion implantation in β-Ga2O3: Physics and technology

A Nikolskaya, E Okulich, D Korolev… - Journal of Vacuum …, 2021 - pubs.aip.org
Gallium oxide, and in particular its thermodynamically stable β-Ga 2 O 3 phase, is within the
most exciting materials in research and technology nowadays due to its unique properties …

Effect of oxygen flow ratio on the performance of RF magnetron sputtered Sn-doped Ga2O3 films and ultraviolet photodetector

C Wang, WH Fan, YC Zhang, PC Kang, WY Wu… - Ceramics …, 2023 - Elsevier
This work explored the properties of RF magnetron sputtered Sn-doped Ga 2 O 3 films
grown on sapphire substrates at different oxygen flow ratios from 0.0 to 2.5%. The in situ …

Atomic-scale characterization of structural damage and recovery in Sn ion-implanted β-Ga2O3

T Yoo, X Xia, F Ren, A Jacobs, MJ Tadjer… - Applied Physics …, 2022 - pubs.aip.org
β-Ga 2 O 3 is an emerging ultra-wide bandgap semiconductor, holding a tremendous
potential for power-switching devices for next-generation high power electronics. The …

[HTML][HTML] Structural transition and recovery of Ge implanted β-Ga2O3

EA Anber, D Foley, AC Lang, J Nathaniel… - Applied Physics …, 2020 - pubs.aip.org
Ion implantation-induced effects were studied in Ge implanted β-Ga 2 O 3 with the fluence
and energy of 3× 10 13 cm− 2/60 keV, 5× 10 13 cm− 2/100 keV, and 7× 10 13 cm− 2/200 …

Diffusion of dopants and impurities in β-Ga2O3

R Sharma, ME Law, F Ren, AY Polyakov… - Journal of Vacuum …, 2021 - pubs.aip.org
The understanding and availability of quantitative measurements of the diffusion of dopants
and impurities in Ga 2 O 3 are currently at an early stage. In this work, we summarize what is …

[HTML][HTML] γ-phase inclusions as common structural defects in alloyed β-(AlxGa1− x) 2O3 and doped β-Ga2O3 films

CS Chang, N Tanen, V Protasenko, TJ Asel, S Mou… - APL Materials, 2021 - pubs.aip.org
β-Ga 2 O 3 is a promising ultra-wide bandgap semiconductor whose properties can be
further enhanced by alloying with Al. Here, using atomic-resolution scanning transmission …

Aperture-limited conduction and its possible mechanism in ion-implanted current aperture vertical β-Ga2O3 MOSFETs

MH Wong, H Murakami, Y Kumagai… - Applied Physics …, 2021 - pubs.aip.org
An anomalous diode-like turn-on behavior was observed in the drain characteristics of
current aperture vertical β-Ga 2 O 3 transistors. This phenomenon was attributable to an …

The effect of annealing on the Sn-doped (− 201) β-Ga2O3 bulk

B Feng, G He, X Zhang, X Chen, Z Li, L Xu… - Materials Science in …, 2022 - Elsevier
Unintentionally-doped (UID) and Sn-doped crystals of (− 201) β-Ga 2 O 3 were high-
temperature annealed in N 2 and O 2 atmospheres. Surface morphology and structure …

Structural and electronic properties of Si-and Sn-doped (− 201) β-Ga2O3 annealed in nitrogen and oxygen atmospheres

MJ Tadjer, JA Freitas, JC Culbertson… - Journal of Physics D …, 2020 - iopscience.iop.org
Abstract Single crystal (− 201) β-Ga 2 O 3 substrates doped with Si and Sn have been
thermally annealed in N 2 and O 2 atmospheres. Structural and electrical properties …