A review on microholes formation in glass-based substrates by electrochemical discharge drilling for MEMS applications

T Singh, J Arab, P Dixit - Machining Science and Technology, 2022 - Taylor & Francis
Continuous demands to develop advanced radio-frequency transmission at higher
frequencies have initiated glass-based materials as a substrate in radio-frequency micro …

Thermo-mechanical reliability of glass substrate and Through Glass Vias (TGV): A comprehensive review

Y Lai, K Pan, S Park - Microelectronics Reliability, 2024 - Elsevier
The evolution of electronic packaging technology towards the adoption of glass substrates
marks a significant advancement in overcoming the constraints posed by traditional organic …

Evolution, challenge, and outlook of TSV, 3D IC integration and 3D silicon integration

JH Lau - … symposium on advanced packaging materials (APM), 2011 - ieeexplore.ieee.org
3D integration consists of 3D IC packaging, 3D IC integration, and 3D Si integration. They
are different and in general the TSV (through-silicon via) separates 3D IC packaging from …

Design, fabrication, and characterization of ultrathin 3-D glass interposers with through-package-vias at same pitch as TSVs in silicon

V Sukumaran, G Kumar… - IEEE Transactions …, 2014 - ieeexplore.ieee.org
A double-sided and ultrathin 3-D glass interposer with through package vias (TPVs) at same
pitch as through silicon vias (TSVs) in silicon interposers is developed to provide a …

[图书][B] Modeling and design of electromagnetic compatibility for high-speed printed circuit boards and packaging

XC Wei - 2017 - taylorfrancis.com
Modeling and Design of Electromagnetic Compatibility for High-Speed Printed Circuit
Boards and Packaging presents the electromagnetic modelling and design of three major …

Fabrication and characterization of through-glass vias by the ECDM process

HK Kannojia, J Arab, BJ Pegu… - Journal of the …, 2019 - iopscience.iop.org
Fabrication and characterization of electrodeposited copper filled through-glass vias (TGV)
are demonstrated on full-scale fused silica wafer for the first time by a simple combination of …

High-efficiency microdrilling of glass by parallel transient and selective laser processing with spatial light modulator

R Yoshizaki, Y Ito, K Ogasawara, A Shibata… - Optics & Laser …, 2022 - Elsevier
To use glass as the substrate material in next-generation large-scale integrations and
biochips, the high-speed fabrication of high-aspect-ratio microholes is necessary. Transient …

Development of through glass via (TGV) formation technology using electrical discharging for 2.5/3D integrated packaging

S Takahashi, K Horiuchi, K Tatsukoshi… - 2013 IEEE 63rd …, 2013 - ieeexplore.ieee.org
This study explored Through Glass Via (TGV) Formation Technology by using Focused
Electrical Discharging Method for alkali-fee glass which has well matched CTE with Si. 2.5 …

[PDF][PDF] 大数据时代光电共封技术的机遇与挑战

卞玲艳, 曾燕萍, 蔡莹, 陆霄, 周倩蓉… - Laser & …, 2024 - researching.cn
摘要人工智能和大数据时代对数据存储, 传输和处理能力的需求日益增加, 数据传输所需带宽和
通信速率也随之增加. 然而系统级封装中的电互连受到介质材料, 传输速率的影响 …

Research of Vertical via Based on Silicon, Ceramic and Glass

W Tian, S Wu, W Li - Micromachines, 2023 - mdpi.com
With the increasing demand for high-density integration, low power consumption and high
bandwidth, creating more sophisticated interconnection technologies is becoming …