Precursors for direct-write nanofabrication with electrons

S Barth, M Huth, F Jungwirth - Journal of Materials Chemistry C, 2020 - pubs.rsc.org
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …

[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …

I Utke, P Swiderek, K Höflich, K Madajska… - Coordination Chemistry …, 2022 - Elsevier
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …

Mechanical properties of 3D nanostructures obtained by focused electron/ion beam-induced deposition: A review

I Utke, J Michler, R Winkler, H Plank - Micromachines, 2020 - mdpi.com
This article reviews the state-of-the-art of mechanical material properties and measurement
methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas …

Impact of electron-beam heating during 3D nanoprinting

E Mutunga, R Winkler, J Sattelkow, PD Rack, H Plank… - ACS …, 2019 - ACS Publications
An artifact limiting the reproduction of three-dimensional (3D) designs using nanoprinting
has been quantified. Beam-induced heating was determined through complementary …

Surface-anchored metal–organic frameworks as versatile resists for gas-assisted e-beam lithography: Fabrication of sub-10 nanometer structures

M Drost, F Tu, L Berger, C Preischl, W Zhou… - ACS …, 2018 - ACS Publications
We demonstrate that surface-anchored metal–organic frameworks (SURMOFs) are
extraordinary well-suited as resists for high-resolution focused electron beam induced …

Cisplatin as a Potential Platinum Focused Electron Beam Induced Deposition Precursor: NH3 Ligands Enhance the Electron-Induced Removal of Chlorine

M Rohdenburg, P Martinović, K Ahlenhoff… - The Journal of …, 2019 - ACS Publications
Nanostructures fabricated by focused electron beam induced deposition (FEBID) often have
low deposit purities that can be traced back to incomplete precursor decomposition. Among …

Pivalate complexes of copper (ii) with aliphatic amines as potential precursors for depositing nanomaterials from the gas phase

A Butrymowicz-Kubiak, W Luba, K Madajska… - New Journal of …, 2024 - pubs.rsc.org
New copper (II) complexes with pivalate and primary aliphatic amines [Cu2 (RNH2) 2 (μ-
O2CtBu) 4] n, where R= tBu, sBu, iPr, and Et were synthesised and characterised. These …

Comparative study of post-growth annealing of Cu (hfac) 2, Co2 (CO) 8 and Me2Au (acac) metal precursors deposited by FEBID

MVP dos Santos, A Szkudlarek… - Beilstein journal of …, 2018 - beilstein-journals.org
Non-noble metals, such as Cu and Co, as well as noble metals, such as Au, can be used in
a number modern technological applications, which include advanced scanning-probe …

High-purity copper structures from a perfluorinated copper carboxylate using focused electron beam induced deposition and post-purification

L Berger, J Jurczyk, K Madajska… - ACS Applied …, 2020 - ACS Publications
The electron-induced modification of volatile physisorbed metal–organic molecules is the
key process in focused electron beam induced deposition (FEBID). In this work, the …

[HTML][HTML] 3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

BB Lewis, R Winkler, X Sang… - Beilstein journal of …, 2017 - beilstein-journals.org
We investigate the growth, purity, grain structure/morphology, and electrical resistivity of 3D
platinum nanowires synthesized via electron beam induced deposition with and without an …