A review of focused ion beam applications in optical fibers
Focused ion beam (FIB) technology has become a promising technique in micro-and nano-
prototyping due to several advantages over its counterparts such as direct (maskless) …
prototyping due to several advantages over its counterparts such as direct (maskless) …
A review of focused ion beam sputtering
This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano
fabrication. Basic principles of FIB were briefly discussed, and then empirical and …
fabrication. Basic principles of FIB were briefly discussed, and then empirical and …
Surface plasmon resonances in periodic and random patterns of gold nano-disks for broadband light harvesting
We analyze the localized surface plasmon resonance spectra of periodic square lattice
arrays of gold nano-disks, and we describe numerically and experimentally the effect of …
arrays of gold nano-disks, and we describe numerically and experimentally the effect of …
Direct‐write ion beam lithography
A Joshi-Imre, S Bauerdick - Journal of Nanotechnology, 2014 - Wiley Online Library
Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that
can be used to create microscale and nanoscale designs on the surface of practically any …
can be used to create microscale and nanoscale designs on the surface of practically any …
Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon
Focused ion beam (FIB) milling is receiving increasing attention for nanostructuring in silicon
(Si). These structures can for example be used for photonic crystal structures in a silicon-on …
(Si). These structures can for example be used for photonic crystal structures in a silicon-on …
Nano-LED array fabrication suitable for future single photon lithography
M Mikulics, H Hardtdegen - Nanotechnology, 2015 - iopscience.iop.org
We report on an alternative illumination concept for a future lithography based on single-
photon emitters and important technological steps towards its implementation. Nano light …
photon emitters and important technological steps towards its implementation. Nano light …
Tuning carrier density and phase transitions in oxide semiconductors using focused ion beams
We demonstrate spatial modification of the optical properties of thin-film metal oxides, zinc
oxide (ZnO) and vanadium dioxide (VO2) as representatives, using a commercial focused …
oxide (ZnO) and vanadium dioxide (VO2) as representatives, using a commercial focused …
Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography
We demonstrate that ion-beam lithography can be applied to the fabrication of rotationally
parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high …
parabolic refractive diamond X-ray micro-lenses that are of interest to the field of high …
Fabrication of nanoporous antireflection surfaces on silicon
MJ Huang, CR Yang, YC Chiou, RT Lee - Solar Energy Materials and Solar …, 2008 - Elsevier
After the surface of a silicon wafer has been texturized, the reflectance of the wafer surface
can be reduced to increase the power generation efficiency of a silicon-based solar cell …
can be reduced to increase the power generation efficiency of a silicon-based solar cell …
In-plane thermal conductivity of sub-20 nm thick suspended mono-crystalline Si layers
We measure the thermal conductivity of a 17.5-nm-thick single crystalline Si layer by using a
suspended structure developed from a silicon-on-insulator wafer, in which the Si layer …
suspended structure developed from a silicon-on-insulator wafer, in which the Si layer …