Microwave acoustic devices: Recent advances and outlook
This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …
innovations and performance advancements have been made in the past decade. The ever …
A review of piezoelectric MEMS sensors and actuators for gas detection application
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
RF acoustic microsystems based on suspended lithium niobate thin films: Advances and outlook
This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3) based
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
acoustic microsystems. Thanks to their high electromechanical coupling (k 2), low loss, and …
6-20 GHz 30% ScAlN Lateral Field-Excited Cross-sectional Lame'Mode Resonators for future mobile RF Front-Ends
This article reports on 30% scandium-doped AlN (ScAlN) lateral field-excited (LFE) cross-
sectional Lame'mode resonators (CLMRs) with unprecedented performance in the 6–20 …
sectional Lame'mode resonators (CLMRs) with unprecedented performance in the 6–20 …
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators
This paper reports on the design, fabrication, and characterization of mode X-cut Lithium
Niobate Laterally Vibrating Resonators (LVRs) operating between 100 MHz and 1 GHz. In …
Niobate Laterally Vibrating Resonators (LVRs) operating between 100 MHz and 1 GHz. In …
Deep learning for non-parameterized MEMS structural design
The geometric designs of MEMS devices can profoundly impact their physical properties
and eventual performances. However, it is challenging for researchers to rationally consider …
and eventual performances. However, it is challenging for researchers to rationally consider …
A novel low-frequency multi-bandgaps metaplate: Genetic algorithm based optimization and experimental validation
Metaplates, ie 2D extruded structures made by a periodic repetition of unit cells that exhibit a
complete and wide 3D bandgap, are attracting increasing interest thanks to the variety of …
complete and wide 3D bandgap, are attracting increasing interest thanks to the variety of …
High-figure-of-merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications
This article reports on the modeling, design, fabrication, and testing of high-performance X-
cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The …
cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The …
Aluminum nitride combined overtone resonators for the 5G high frequency bands
This work presents a new acoustic MEMS resonator technology, dubbed Aluminum Nitride
(AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements …
(AlN) Combined Overtone Resonator (COR), capable of addressing the filter requirements …