Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

V Miikkulainen, M Leskelä, M Ritala… - Journal of Applied …, 2013 - pubs.aip.org
Atomic layer deposition (ALD) is gaining attention as a thin film deposition method, uniquely
suitable for depositing uniform and conformal films on complex three-dimensional …

Ultra-wideband integrated photonic devices on silicon platform: from visible to mid-IR

X Guo, X Ji, B Yao, T Tan, A Chu, O Westreich… - …, 2023 - degruyter.com
Silicon photonics has gained great success mainly due to the promise of realizing compact
devices in high volume through the low-cost foundry model. It is burgeoning from laboratory …

Photonic integration for UV to IR applications

DJ Blumenthal - APL Photonics, 2020 - pubs.aip.org
Photonic integration opens the potential to reduce size, power, and cost of applications
normally relegated to table-and rack-sized systems. Today, a wide range of precision, high …

[HTML][HTML] Low-loss integrated photonics for the blue and ultraviolet regime

GN West, W Loh, D Kharas, C Sorace-Agaskar… - Apl Photonics, 2019 - pubs.aip.org
We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV)
regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide …

Superhydrophobic antireflection coating on glass using grass-like alumina and fluoropolymer

K Isakov, C Kauppinen, S Franssila… - ACS applied materials …, 2020 - ACS Publications
This work presents a superhydrophobic antireflective (AR) coating on glass. The coating
consists of a grass-like alumina layer capped with plasma-deposited fluoropolymer. The …

Micro-fabricated components for cold atom sensors

JP McGilligan, K Gallacher, PF Griffin… - Review of Scientific …, 2022 - pubs.aip.org
Laser cooled atoms have proven transformative for precision metrology, playing a pivotal
role in state-of-the-art clocks and interferometers and having the potential to provide a step …

Rare-earth ion doped Al2O3 for active integrated photonics

WAPM Hendriks, L Chang, CI Van Emmerik… - … in Physics: X, 2021 - Taylor & Francis
ABSTRACT Aluminum oxide (Al2O3) is an emerging material in integrated photonics. It
exhibits a very broad transparency window from the UV to the mid-IR, very low propagation …

Glass optical waveguides: a review of fabrication techniques

GC Righini, A Chiappini - Optical Engineering, 2014 - spiedigitallibrary.org
Glasses, either pure or suitably doped, constitute an excellent material for the development
of integrated optical circuits. A brief review is presented of the most widely used processes …

Versatile silicon nitride and alumina integrated photonic platforms for the ultraviolet to short-wave infrared

C Sorace-Agaskar, D Kharas… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
We demonstrate scalable and intercompatible multilayer photonic platforms that operate
over a multioctave wavelength range from the near-ultraviolet (NUV) into the short-wave …

SiN foundry platform for high performance visible light integrated photonics

JA Smith, H Francis, G Navickaite… - Optical Materials …, 2023 - opg.optica.org
We present a high performance silicon nitride photonic integrated circuit platform operating
at visible wavelengths, accessible through the commercial foundry, LIGENTEC. Propagation …