Because of the low dimensional power of its force scaling law, surface tension is appropriate
for carrying out reshaping and assembly in the microstructure size domain. This paper …

The paper reviews the state-of-the-art of miniaturized tunable lasers constructed by
microelectromechanical systems (MEMS) technology, covering various topics of laser …

Microelectromechanical systems (MEMS) are evolving into highly integrated technologies
for a variety of application areas. Add the biological dimension to the mix and a host of new …

We report on vertical mirrors fabricated by deep reactive ion etching of silicon. The mirror
height is 75/spl mu/m, covering the fiber core of a single-mode fiber when the latter is placed …

This paper describes Si-micromachined two-axis beam-steering micromirrors and their
performance in 256× 256-and 1024× 1024-port large optical cross-connects (OXCs). The …

We present an LED-based ultra-mini DMD projector with a size of 75 mm x 67 mm x 42 mm.
A compact homogenizer consisting of a double-side microlens array and two condensers …

We describe the design and fabrication of surface-micromachined resonant microscanners
that have large scan angles and fast scan speeds. These scanning micromirrors, which are …

This paper describes a simple and effective method to fabricate a plastic microlens array
with controllable shape and high fill-factor, which utilizes the conventional lithography and …

A new surface micromachining process for surface tension powered self-assembly of silicon-
based microstructures is described. Mechanical parts are formed from bonded silicon-on …

Microlenses and microlens arrays were fabricated using a novel fabrication technology
based on the exposure of a resist (usually PMMA) to deep x-rays and subsequent thermal …