Micromachined accelerometers with sub-µg/√ Hz noise floor: a review
This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …
Fabrication of a MEMS micromirror based on bulk silicon micromachining combined with grayscale lithography
A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on
vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing …
vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing …
Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging
Multisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer
neural probes combine rigid silicon and flexible polymer parts into one single device and …
neural probes combine rigid silicon and flexible polymer parts into one single device and …
[HTML][HTML] Fabrication and electrical characterization of low-temperature polysilicon films for sensor applications
The development of low-temperature piezoresistive materials provides compatibility with
standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such …
standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such …
Design for Manufacturability a Holistic Approach for the Development of MEMS Inertial Sensors
G Nagesh, AR Ranji, S Sahanbadadi, K Li… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
Micro-electromechanical system (MEMS) inertial sensors aiming for a high accuracy must
anticipate and accommodate for manufacturing variations during the design stage, thereby …
anticipate and accommodate for manufacturing variations during the design stage, thereby …
[HTML][HTML] Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
This work presents a micromachining process that allows the creation of hierarchical,
matryoshka-like MEMS structures that can be used for multi-axis sensing. This novel …
matryoshka-like MEMS structures that can be used for multi-axis sensing. This novel …
Ultra-High Sensitivity Pull-In Time Mems Accelerometer for Satellite Gravimetry
IS Garcia, DE Santos, JB Queiroz… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
Satellite gravimetry applications require sub-ng acceleration resolution at frequencies below
100 mHz, demanding low-noise (mechanical-thermal, 1/f and electronic) and high-sensitivity …
100 mHz, demanding low-noise (mechanical-thermal, 1/f and electronic) and high-sensitivity …
Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer
IS Garcia, J Fernandes, JB Queiroz… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
MEMS accelerometers have been around for many years and became a key element to
different applications, such as inertial navigation, or geophysical sensing. Some of those …
different applications, such as inertial navigation, or geophysical sensing. Some of those …
MEMS scanners with diffractive optical elements for LiDAR applications
ISM Garcia - 2024 - search.proquest.com
Abstract MEMS (Micro-Electro-Mechanical Systems) applied to optical scanning systems
have the ability to modulate light using a miniaturised system and have driven several …
have the ability to modulate light using a miniaturised system and have driven several …