Micromachined accelerometers with sub-µg/√ Hz noise floor: a review

C Wang, F Chen, Y Wang, S Sadeghpour, C Wang… - Sensors, 2020 - mdpi.com
This paper reviews the research and development of micromachined accelerometers with a
noise floor lower than 1 µg/√ Hz. Firstly, the basic working principle of micromachined …

Fabrication of a MEMS micromirror based on bulk silicon micromachining combined with grayscale lithography

IS Garcia, C Ferreira, JD Santos… - Journal of …, 2020 - ieeexplore.ieee.org
A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on
vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing …

Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging

A Novais, C Calaza, J Fernandes, H Fonseca… - Sensors, 2021 - mdpi.com
Multisite neural probes are a fundamental tool to study brain function. Hybrid silicon/polymer
neural probes combine rigid silicon and flexible polymer parts into one single device and …

[HTML][HTML] Fabrication and electrical characterization of low-temperature polysilicon films for sensor applications

FC Mota, IS Garcia, A Retolaza, DE Santos… - …, 2024 - pmc.ncbi.nlm.nih.gov
The development of low-temperature piezoresistive materials provides compatibility with
standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such …

Design for Manufacturability a Holistic Approach for the Development of MEMS Inertial Sensors

G Nagesh, AR Ranji, S Sahanbadadi, K Li… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
Micro-electromechanical system (MEMS) inertial sensors aiming for a high accuracy must
anticipate and accommodate for manufacturing variations during the design stage, thereby …

[HTML][HTML] Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers

IS Garcia, J Fernandes, JB Queiroz, C Calaza… - Micro and Nano …, 2023 - Elsevier
This work presents a micromachining process that allows the creation of hierarchical,
matryoshka-like MEMS structures that can be used for multi-axis sensing. This novel …

Ultra-High Sensitivity Pull-In Time Mems Accelerometer for Satellite Gravimetry

IS Garcia, DE Santos, JB Queiroz… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
Satellite gravimetry applications require sub-ng acceleration resolution at frequencies below
100 mHz, demanding low-noise (mechanical-thermal, 1/f and electronic) and high-sensitivity …

Double-Proof Mass SOI-Based Matryoshka-Like 3-Axis MEMS Accelerometer

IS Garcia, J Fernandes, JB Queiroz… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
MEMS accelerometers have been around for many years and became a key element to
different applications, such as inertial navigation, or geophysical sensing. Some of those …

MEMS scanners with diffractive optical elements for LiDAR applications

ISM Garcia - 2024 - search.proquest.com
Abstract MEMS (Micro-Electro-Mechanical Systems) applied to optical scanning systems
have the ability to modulate light using a miniaturised system and have driven several …