W Yang, D Xu, Y Gao, L Hu, P Ke, J Chen - Diamond and Related Materials, 2019 - Elsevier
Abstract (Si: N)-DLC, Si/(Si: N)-DLC, Si 3 N 4/(Si: N)-DLC and Si/Si 3 N 4/(Si: N)-DLC four
films were deposited on the pure Ti substrates, using a hybrid ion beam deposition system …